JPH0270431U - - Google Patents

Info

Publication number
JPH0270431U
JPH0270431U JP15060388U JP15060388U JPH0270431U JP H0270431 U JPH0270431 U JP H0270431U JP 15060388 U JP15060388 U JP 15060388U JP 15060388 U JP15060388 U JP 15060388U JP H0270431 U JPH0270431 U JP H0270431U
Authority
JP
Japan
Prior art keywords
target
magnet
rotatably installed
sputtering device
target stand
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15060388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15060388U priority Critical patent/JPH0270431U/ja
Publication of JPH0270431U publication Critical patent/JPH0270431U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15060388U 1988-11-18 1988-11-18 Pending JPH0270431U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15060388U JPH0270431U (enrdf_load_stackoverflow) 1988-11-18 1988-11-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15060388U JPH0270431U (enrdf_load_stackoverflow) 1988-11-18 1988-11-18

Publications (1)

Publication Number Publication Date
JPH0270431U true JPH0270431U (enrdf_load_stackoverflow) 1990-05-29

Family

ID=31423897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15060388U Pending JPH0270431U (enrdf_load_stackoverflow) 1988-11-18 1988-11-18

Country Status (1)

Country Link
JP (1) JPH0270431U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010090033A (ko) * 2001-08-14 2001-10-18 손종역 박막의 레이저 증착에서 1축 제어방식의 멀티타겟홀터.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010090033A (ko) * 2001-08-14 2001-10-18 손종역 박막의 레이저 증착에서 1축 제어방식의 멀티타겟홀터.

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