JPH01149460U - - Google Patents
Info
- Publication number
- JPH01149460U JPH01149460U JP4782788U JP4782788U JPH01149460U JP H01149460 U JPH01149460 U JP H01149460U JP 4782788 U JP4782788 U JP 4782788U JP 4782788 U JP4782788 U JP 4782788U JP H01149460 U JPH01149460 U JP H01149460U
- Authority
- JP
- Japan
- Prior art keywords
- composition ratio
- cutting part
- required composition
- component material
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003628 erosive effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 3
- 238000001755 magnetron sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4782788U JPH01149460U (enrdf_load_stackoverflow) | 1988-04-08 | 1988-04-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4782788U JPH01149460U (enrdf_load_stackoverflow) | 1988-04-08 | 1988-04-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01149460U true JPH01149460U (enrdf_load_stackoverflow) | 1989-10-17 |
Family
ID=31274009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4782788U Pending JPH01149460U (enrdf_load_stackoverflow) | 1988-04-08 | 1988-04-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01149460U (enrdf_load_stackoverflow) |
-
1988
- 1988-04-08 JP JP4782788U patent/JPH01149460U/ja active Pending
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