JPS623571U - - Google Patents

Info

Publication number
JPS623571U
JPS623571U JP9282385U JP9282385U JPS623571U JP S623571 U JPS623571 U JP S623571U JP 9282385 U JP9282385 U JP 9282385U JP 9282385 U JP9282385 U JP 9282385U JP S623571 U JPS623571 U JP S623571U
Authority
JP
Japan
Prior art keywords
target
recess
magnetron sputtering
back surface
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9282385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9282385U priority Critical patent/JPS623571U/ja
Publication of JPS623571U publication Critical patent/JPS623571U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9282385U 1985-06-19 1985-06-19 Pending JPS623571U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9282385U JPS623571U (enrdf_load_stackoverflow) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9282385U JPS623571U (enrdf_load_stackoverflow) 1985-06-19 1985-06-19

Publications (1)

Publication Number Publication Date
JPS623571U true JPS623571U (enrdf_load_stackoverflow) 1987-01-10

Family

ID=30649961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9282385U Pending JPS623571U (enrdf_load_stackoverflow) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPS623571U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS623571U (enrdf_load_stackoverflow)
JPH023463U (enrdf_load_stackoverflow)
JPS6186459U (enrdf_load_stackoverflow)
JPS62153365U (enrdf_load_stackoverflow)
JPS62174573U (enrdf_load_stackoverflow)
JPS63135964U (enrdf_load_stackoverflow)
JPS6270499U (enrdf_load_stackoverflow)
JPS63129992U (enrdf_load_stackoverflow)
JPS61206672U (enrdf_load_stackoverflow)
JPH0320232U (enrdf_load_stackoverflow)
JPH0254133U (enrdf_load_stackoverflow)
JPH0186668U (enrdf_load_stackoverflow)
JPS6253677U (enrdf_load_stackoverflow)
JPS5921661U (ja) スパツタリングカソ−ド
JPS60102248U (ja) スパツタリング用タ−ゲツト装置
JPH03120554U (enrdf_load_stackoverflow)
JPH0392242U (enrdf_load_stackoverflow)
JPS648269U (enrdf_load_stackoverflow)
JPH0314473U (enrdf_load_stackoverflow)
JPS63195565U (enrdf_load_stackoverflow)
JPH0365913U (enrdf_load_stackoverflow)
JPS63109187U (enrdf_load_stackoverflow)
JPS61196526U (enrdf_load_stackoverflow)
JPS6222214U (enrdf_load_stackoverflow)
JPS6056762U (ja) スパツタリング用タ−ゲツト