JPH0265136U - - Google Patents
Info
- Publication number
- JPH0265136U JPH0265136U JP14568588U JP14568588U JPH0265136U JP H0265136 U JPH0265136 U JP H0265136U JP 14568588 U JP14568588 U JP 14568588U JP 14568588 U JP14568588 U JP 14568588U JP H0265136 U JPH0265136 U JP H0265136U
- Authority
- JP
- Japan
- Prior art keywords
- metal diaphragm
- holder
- holder body
- sensor device
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 238000012856 packing Methods 0.000 claims description 2
- 238000010292 electrical insulation Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第1図は本考案にかかる圧力センサ装置の一実
施例を示す部分断面図、第2図は従来例を示す部
分断面図である。
10……圧力センサ装置、11……ホルダ本体
、11A……貫通孔、11a……一端面、11b
……他端面、11c……ネジ部、12……ホルダ
蓋体、12A……貫通孔、12a……ネジ部、1
3……金属ダイヤフラム、14……絶縁膜、15
……電極、15a……リード線、16……パツキ
ング部材。
FIG. 1 is a partial sectional view showing an embodiment of a pressure sensor device according to the present invention, and FIG. 2 is a partial sectional view showing a conventional example. 10 ...Pressure sensor device, 11...Holder main body, 11A...Through hole, 11a...One end surface, 11b
...Other end surface, 11c...Threaded part, 12...Holder lid body, 12A...Threaded hole, 12a...Threaded part, 1
3... Metal diaphragm, 14... Insulating film, 15
... Electrode, 15a ... Lead wire, 16 ... Packing member.
Claims (1)
属ダイアフラムの感歪部に対し絶縁層を介して電
極が配設された圧力センサ装置において、ホルダ
本体およびホルダ蓋体と金属ダイアフラムとの接
触面に対して電気絶縁性のパツキング部材を配設
することにより、金属ダイアフラムとホルダ本体
およびホルダ蓋体との間の電気絶縁を確保し、か
つホルダ本体と金属ダイアフラムとの間に形成さ
れた圧力空間のシールを確保してなることを特徴
とする圧力センサ装置。 In a pressure sensor device in which an electrode is provided via an insulating layer to the strain-sensitive part of a metal diaphragm placed between the holder body and the holder lid, contact between the holder body and the holder lid and the metal diaphragm By arranging an electrically insulating packing member on the surface, electrical insulation is ensured between the metal diaphragm, the holder body, and the holder lid, and the pressure generated between the holder body and the metal diaphragm is A pressure sensor device characterized by ensuring a space seal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14568588U JPH0265136U (en) | 1988-11-08 | 1988-11-08 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14568588U JPH0265136U (en) | 1988-11-08 | 1988-11-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0265136U true JPH0265136U (en) | 1990-05-16 |
Family
ID=31414493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14568588U Pending JPH0265136U (en) | 1988-11-08 | 1988-11-08 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0265136U (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5131197A (en) * | 1974-09-10 | 1976-03-17 | Kizo Hirai | |
JPS5241152A (en) * | 1975-09-26 | 1977-03-30 | Fagersta Ab | Multiilayer metal strip and the method to manufacture it |
-
1988
- 1988-11-08 JP JP14568588U patent/JPH0265136U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5131197A (en) * | 1974-09-10 | 1976-03-17 | Kizo Hirai | |
JPS5241152A (en) * | 1975-09-26 | 1977-03-30 | Fagersta Ab | Multiilayer metal strip and the method to manufacture it |
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