JPH02645B2 - - Google Patents
Info
- Publication number
- JPH02645B2 JPH02645B2 JP58118145A JP11814583A JPH02645B2 JP H02645 B2 JPH02645 B2 JP H02645B2 JP 58118145 A JP58118145 A JP 58118145A JP 11814583 A JP11814583 A JP 11814583A JP H02645 B2 JPH02645 B2 JP H02645B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- transducer
- thickness
- transducers
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58118145A JPS6011109A (ja) | 1983-07-01 | 1983-07-01 | 電磁超音波測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58118145A JPS6011109A (ja) | 1983-07-01 | 1983-07-01 | 電磁超音波測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6011109A JPS6011109A (ja) | 1985-01-21 |
| JPH02645B2 true JPH02645B2 (OSRAM) | 1990-01-09 |
Family
ID=14729187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58118145A Granted JPS6011109A (ja) | 1983-07-01 | 1983-07-01 | 電磁超音波測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6011109A (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0664026B2 (ja) * | 1986-01-10 | 1994-08-22 | 株式会社日立製作所 | 電磁超音波計測装置 |
| JP3033104B2 (ja) * | 1989-11-17 | 2000-04-17 | ソニー株式会社 | エッチング方法 |
-
1983
- 1983-07-01 JP JP58118145A patent/JPS6011109A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6011109A (ja) | 1985-01-21 |
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