JPH0263540U - - Google Patents

Info

Publication number
JPH0263540U
JPH0263540U JP12792789U JP12792789U JPH0263540U JP H0263540 U JPH0263540 U JP H0263540U JP 12792789 U JP12792789 U JP 12792789U JP 12792789 U JP12792789 U JP 12792789U JP H0263540 U JPH0263540 U JP H0263540U
Authority
JP
Japan
Prior art keywords
pair
drive shaft
driven
wafer
cassettes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12792789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989127927U priority Critical patent/JPH0311889Y2/ja
Publication of JPH0263540U publication Critical patent/JPH0263540U/ja
Application granted granted Critical
Publication of JPH0311889Y2 publication Critical patent/JPH0311889Y2/ja
Expired legal-status Critical Current

Links

JP1989127927U 1989-11-02 1989-11-02 Expired JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989127927U JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-02 1989-11-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989127927U JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-02 1989-11-02

Publications (2)

Publication Number Publication Date
JPH0263540U true JPH0263540U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-05-11
JPH0311889Y2 JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-20

Family

ID=31380799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989127927U Expired JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-02 1989-11-02

Country Status (1)

Country Link
JP (1) JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821352A (ja) * 1981-07-29 1983-02-08 Toshiba Corp 半導体ウエハの方向決め方式

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821352A (ja) * 1981-07-29 1983-02-08 Toshiba Corp 半導体ウエハの方向決め方式

Also Published As

Publication number Publication date
JPH0311889Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-20

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