JPH0263530U - - Google Patents
Info
- Publication number
- JPH0263530U JPH0263530U JP14333788U JP14333788U JPH0263530U JP H0263530 U JPH0263530 U JP H0263530U JP 14333788 U JP14333788 U JP 14333788U JP 14333788 U JP14333788 U JP 14333788U JP H0263530 U JPH0263530 U JP H0263530U
- Authority
- JP
- Japan
- Prior art keywords
- mask
- deflection
- amount
- wafer
- print gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14333788U JPH0263530U (cs) | 1988-10-31 | 1988-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14333788U JPH0263530U (cs) | 1988-10-31 | 1988-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0263530U true JPH0263530U (cs) | 1990-05-11 |
Family
ID=31410068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14333788U Pending JPH0263530U (cs) | 1988-10-31 | 1988-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0263530U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006350192A (ja) * | 2005-06-20 | 2006-12-28 | Ono Sokki Co Ltd | 露光機の整合装置及び露光機の整合方法 |
| JP2013120789A (ja) * | 2011-12-06 | 2013-06-17 | National Institute Of Advanced Industrial & Technology | 露光装置 |
-
1988
- 1988-10-31 JP JP14333788U patent/JPH0263530U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006350192A (ja) * | 2005-06-20 | 2006-12-28 | Ono Sokki Co Ltd | 露光機の整合装置及び露光機の整合方法 |
| JP2013120789A (ja) * | 2011-12-06 | 2013-06-17 | National Institute Of Advanced Industrial & Technology | 露光装置 |