JPH0262294B2 - - Google Patents

Info

Publication number
JPH0262294B2
JPH0262294B2 JP59272104A JP27210484A JPH0262294B2 JP H0262294 B2 JPH0262294 B2 JP H0262294B2 JP 59272104 A JP59272104 A JP 59272104A JP 27210484 A JP27210484 A JP 27210484A JP H0262294 B2 JPH0262294 B2 JP H0262294B2
Authority
JP
Japan
Prior art keywords
organosilicon compound
compound containing
plasma
gas
silane coupling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59272104A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61149226A (ja
Inventor
Shigeru Asako
Koichi Okita
Shinichi Toyooka
Katsuya Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59272104A priority Critical patent/JPS61149226A/ja
Publication of JPS61149226A publication Critical patent/JPS61149226A/ja
Publication of JPH0262294B2 publication Critical patent/JPH0262294B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Laminated Bodies (AREA)
  • Polymerisation Methods In General (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
JP59272104A 1984-12-25 1984-12-25 ガス選択透過性複合膜およびその製造方法 Granted JPS61149226A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59272104A JPS61149226A (ja) 1984-12-25 1984-12-25 ガス選択透過性複合膜およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59272104A JPS61149226A (ja) 1984-12-25 1984-12-25 ガス選択透過性複合膜およびその製造方法

Publications (2)

Publication Number Publication Date
JPS61149226A JPS61149226A (ja) 1986-07-07
JPH0262294B2 true JPH0262294B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-12-25

Family

ID=17509130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59272104A Granted JPS61149226A (ja) 1984-12-25 1984-12-25 ガス選択透過性複合膜およびその製造方法

Country Status (1)

Country Link
JP (1) JPS61149226A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014101818A (ja) * 2012-11-20 2014-06-05 Toshiba Corp 浸透圧発電方法および装置、並びにそれらに使用される浸透圧発生器

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2730888B2 (ja) * 1986-04-28 1998-03-25 三菱電機株式会社 半導体装置
JP3442160B2 (ja) * 1994-09-30 2003-09-02 東燃ゼネラル石油株式会社 ＳｉＯ２ 系セラミック被膜の形成方法
JP5469905B2 (ja) * 2009-04-09 2014-04-16 株式会社ノリタケカンパニーリミテド ガス分離材およびその製造方法
JP2011148968A (ja) * 2009-12-21 2011-08-04 Arai Seisakusho Co Ltd 表面改質方法および弾性複合材の製造方法ならびに弾性複合材
JP5935051B2 (ja) 2014-08-05 2016-06-15 株式会社潤工社 フッ素樹脂チューブ
SG11201807211XA (en) 2016-02-26 2018-09-27 Versum Materials Us Llc Compositions and methods using same for deposition of silicon-containing film

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5791705A (en) * 1980-11-26 1982-06-08 Canon Inc Method and apparatus for water-washing and separating vapor phase dry cleaning agent
JPS5924843B2 (ja) * 1981-07-06 1984-06-12 住友電気工業株式会社 ガス選択透過性複合膜の製造方法
JPS5949802A (ja) * 1982-09-17 1984-03-22 Teijin Ltd 気体分離用選択透過膜
EP0107636B1 (en) * 1982-09-16 1986-12-30 Monsanto Company Multicomponent membrane for gas separation
JPS5959220A (ja) * 1982-09-28 1984-04-05 Teijin Ltd 気体分離用複合透過膜の製造法
JPS5962303A (ja) * 1982-09-30 1984-04-09 Kobunshi Oyo Gijutsu Kenkyu Kumiai 酸素分離富化膜
JPS59189905A (ja) * 1983-04-14 1984-10-27 Nippon Oil Co Ltd 気体分離用選択性透過膜
US4484935A (en) * 1983-06-30 1984-11-27 Monsanto Company Permeation modified membrane
JPS61111121A (ja) * 1984-11-02 1986-05-29 Toray Ind Inc 気体分離用複合膜
JPS61129008A (ja) * 1984-11-28 1986-06-17 Sanyo Chem Ind Ltd 気体分離用複合膜および製造法
JPH0692744B2 (ja) * 1985-09-10 1994-11-16 株式会社ゼクセル ガバナの始動増量機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014101818A (ja) * 2012-11-20 2014-06-05 Toshiba Corp 浸透圧発電方法および装置、並びにそれらに使用される浸透圧発生器

Also Published As

Publication number Publication date
JPS61149226A (ja) 1986-07-07

Similar Documents

Publication Publication Date Title
US4483901A (en) Selectively gas-permeable composite membrane and process for production thereof
US4533369A (en) Gas-permselective composite membranes and process for the production thereof
Kawakami et al. Modification of gas permeabilities of polymer membranes by plasma coating
JPH07304887A (ja) 複合膜およびその製造方法
JPH0262294B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR101683776B1 (ko) 개시제를 사용하는 화학기상증착(iCVD) 공정을 이용한 가스 분리막의 제조방법
JPH038808B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
Matsuyama et al. Plasma polymerized membranes from organosilicon compounds for separation of oxygen over nitrogen
Lin et al. Improvement of oxygen/nitrogen permselectivity of poly [1-(trimethylsilyl)-1-propyne] membrane by plasma polymerization
JPH0157614B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS586207A (ja) ガス選択透過性複合膜の製造方法
JPH051049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0310368B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6336286B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6025507A (ja) ガス選択透過性複合膜およびその製造方法
JPS61149210A (ja) ガス選択透過性複合膜の製造方法
JPS61153105A (ja) ガス選択透過性複合膜の製造方法
JPS6260933B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6334772B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US20240091717A1 (en) Gas separation membrane and method of producing gas separation membrane
JPS59225704A (ja) ガス選択透過性複合膜およびその製造方法
JPH0698284B2 (ja) 多孔性中空糸複合膜及びその製造方法
JPS6391123A (ja) 多孔性中空糸複合膜及びその製造方法
JPS6254049B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0479690B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term