JPH0261676B2 - - Google Patents

Info

Publication number
JPH0261676B2
JPH0261676B2 JP17782784A JP17782784A JPH0261676B2 JP H0261676 B2 JPH0261676 B2 JP H0261676B2 JP 17782784 A JP17782784 A JP 17782784A JP 17782784 A JP17782784 A JP 17782784A JP H0261676 B2 JPH0261676 B2 JP H0261676B2
Authority
JP
Japan
Prior art keywords
pressure
valve
spring
diaphragm
differential pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17782784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6155482A (ja
Inventor
Akihiko Shizuri
Hirokazu Irisa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP17782784A priority Critical patent/JPS6155482A/ja
Publication of JPS6155482A publication Critical patent/JPS6155482A/ja
Publication of JPH0261676B2 publication Critical patent/JPH0261676B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/04Control of fluid pressure without auxiliary power
    • G05D16/06Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/063Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane
    • G05D16/0644Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator
    • G05D16/0672Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator using several spring-loaded membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid-Driven Valves (AREA)
JP17782784A 1984-08-27 1984-08-27 差圧駆動型三方弁 Granted JPS6155482A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17782784A JPS6155482A (ja) 1984-08-27 1984-08-27 差圧駆動型三方弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17782784A JPS6155482A (ja) 1984-08-27 1984-08-27 差圧駆動型三方弁

Publications (2)

Publication Number Publication Date
JPS6155482A JPS6155482A (ja) 1986-03-19
JPH0261676B2 true JPH0261676B2 (enrdf_load_stackoverflow) 1990-12-20

Family

ID=16037796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17782784A Granted JPS6155482A (ja) 1984-08-27 1984-08-27 差圧駆動型三方弁

Country Status (1)

Country Link
JP (1) JPS6155482A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3276936B2 (ja) * 1998-12-25 2002-04-22 アドバンス電気工業株式会社 流量コントロールバルブ
DE69917585T2 (de) * 1999-01-22 2005-06-09 Idr Holding S.A. Ventil zur Regelung eines Druckgases
CN101900213B (zh) * 2010-07-09 2012-01-25 杭州浙大精益机电技术工程有限公司 带有循环的膜片式流量调节阀

Also Published As

Publication number Publication date
JPS6155482A (ja) 1986-03-19

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