JPS6155482A - 差圧駆動型三方弁 - Google Patents

差圧駆動型三方弁

Info

Publication number
JPS6155482A
JPS6155482A JP17782784A JP17782784A JPS6155482A JP S6155482 A JPS6155482 A JP S6155482A JP 17782784 A JP17782784 A JP 17782784A JP 17782784 A JP17782784 A JP 17782784A JP S6155482 A JPS6155482 A JP S6155482A
Authority
JP
Japan
Prior art keywords
pressure
valve
chamber
screw shaft
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17782784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261676B2 (enrdf_load_stackoverflow
Inventor
Akihiko Shizuri
志津利　晃彦
Hirokazu Irisa
入佐　弘和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP17782784A priority Critical patent/JPS6155482A/ja
Publication of JPS6155482A publication Critical patent/JPS6155482A/ja
Publication of JPH0261676B2 publication Critical patent/JPH0261676B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/04—Control of fluid pressure without auxiliary power
    • G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
    • G05D16/063—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane
    • G05D16/0644—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator
    • G05D16/0672—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being a membrane the membrane acting directly on the obturator using several spring-loaded membranes

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid-Driven Valves (AREA)
JP17782784A 1984-08-27 1984-08-27 差圧駆動型三方弁 Granted JPS6155482A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17782784A JPS6155482A (ja) 1984-08-27 1984-08-27 差圧駆動型三方弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17782784A JPS6155482A (ja) 1984-08-27 1984-08-27 差圧駆動型三方弁

Publications (2)

Publication Number Publication Date
JPS6155482A true JPS6155482A (ja) 1986-03-19
JPH0261676B2 JPH0261676B2 (enrdf_load_stackoverflow) 1990-12-20

Family

ID=16037796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17782784A Granted JPS6155482A (ja) 1984-08-27 1984-08-27 差圧駆動型三方弁

Country Status (1)

Country Link
JP (1) JPS6155482A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1014244A1 (en) * 1998-12-25 2000-06-28 Advance Denki Kougyou Kabushiki Kaisha Flow control valve
EP1022633A1 (en) * 1999-01-22 2000-07-26 Idr Holding S.A. A valve for regulating pressurised gas
CN101900213A (zh) * 2010-07-09 2010-12-01 杭州浙大精益机电技术工程有限公司 带有循环的膜片式流量调节阀

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1014244A1 (en) * 1998-12-25 2000-06-28 Advance Denki Kougyou Kabushiki Kaisha Flow control valve
KR100580809B1 (ko) * 1998-12-25 2006-05-16 아드반스 덴키 고교 가부시키가이샤 유량제어밸브
EP1022633A1 (en) * 1999-01-22 2000-07-26 Idr Holding S.A. A valve for regulating pressurised gas
CN101900213A (zh) * 2010-07-09 2010-12-01 杭州浙大精益机电技术工程有限公司 带有循环的膜片式流量调节阀

Also Published As

Publication number Publication date
JPH0261676B2 (enrdf_load_stackoverflow) 1990-12-20

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