JPH0261137B2 - - Google Patents
Info
- Publication number
- JPH0261137B2 JPH0261137B2 JP20775387A JP20775387A JPH0261137B2 JP H0261137 B2 JPH0261137 B2 JP H0261137B2 JP 20775387 A JP20775387 A JP 20775387A JP 20775387 A JP20775387 A JP 20775387A JP H0261137 B2 JPH0261137 B2 JP H0261137B2
- Authority
- JP
- Japan
- Prior art keywords
- heat sink
- crystal
- internal heat
- quartz tube
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20775387A JPS6450519A (en) | 1987-08-21 | 1987-08-21 | Apparatus for liquid growth of semiconductor crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20775387A JPS6450519A (en) | 1987-08-21 | 1987-08-21 | Apparatus for liquid growth of semiconductor crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6450519A JPS6450519A (en) | 1989-02-27 |
| JPH0261137B2 true JPH0261137B2 (OSRAM) | 1990-12-19 |
Family
ID=16544973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20775387A Granted JPS6450519A (en) | 1987-08-21 | 1987-08-21 | Apparatus for liquid growth of semiconductor crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6450519A (OSRAM) |
-
1987
- 1987-08-21 JP JP20775387A patent/JPS6450519A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6450519A (en) | 1989-02-27 |
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