JPH0261134B2 - - Google Patents

Info

Publication number
JPH0261134B2
JPH0261134B2 JP55134064A JP13406480A JPH0261134B2 JP H0261134 B2 JPH0261134 B2 JP H0261134B2 JP 55134064 A JP55134064 A JP 55134064A JP 13406480 A JP13406480 A JP 13406480A JP H0261134 B2 JPH0261134 B2 JP H0261134B2
Authority
JP
Japan
Prior art keywords
sample
electron beam
sample substrate
detector
magazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55134064A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5759324A (en
Inventor
Tooru Tojo
Yasunobu Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd filed Critical Toshiba Corp
Priority to JP13406480A priority Critical patent/JPS5759324A/ja
Publication of JPS5759324A publication Critical patent/JPS5759324A/ja
Publication of JPH0261134B2 publication Critical patent/JPH0261134B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP13406480A 1980-09-26 1980-09-26 Device for exposure of electron beam Granted JPS5759324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13406480A JPS5759324A (en) 1980-09-26 1980-09-26 Device for exposure of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13406480A JPS5759324A (en) 1980-09-26 1980-09-26 Device for exposure of electron beam

Publications (2)

Publication Number Publication Date
JPS5759324A JPS5759324A (en) 1982-04-09
JPH0261134B2 true JPH0261134B2 (enrdf_load_stackoverflow) 1990-12-19

Family

ID=15119517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13406480A Granted JPS5759324A (en) 1980-09-26 1980-09-26 Device for exposure of electron beam

Country Status (1)

Country Link
JP (1) JPS5759324A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121230A (en) * 1981-01-21 1982-07-28 Nippon Telegr & Teleph Corp <Ntt> Positioning device of cassette
JPS62128628U (enrdf_load_stackoverflow) * 1986-02-07 1987-08-14

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5622138B2 (enrdf_load_stackoverflow) * 1972-09-20 1981-05-23

Also Published As

Publication number Publication date
JPS5759324A (en) 1982-04-09

Similar Documents

Publication Publication Date Title
US4716299A (en) Apparatus for conveying and inspecting a substrate
US4621272A (en) Photosensitive medium cassette-receiver system
JPH10154646A (ja) 搬送装置
US3221620A (en) Photographic film marking device
JPH0261134B2 (enrdf_load_stackoverflow)
US3891850A (en) X-ray table
JP4002429B2 (ja) 異物検査機能を備えた露光装置及びその装置における異物検査方法
JPS6355210B2 (enrdf_load_stackoverflow)
KR102148748B1 (ko) 간섭 회피 검사를 위한 엑스레이 검사 장치
JPH07128869A (ja) 露光装置およびワークの露光方法
JPH05294405A (ja) 基板検出装置
JP2005338555A (ja) 露光装置、露光方法および露光処理プログラム
US4592633A (en) Photographing apparatus
KR102778104B1 (ko) 포토 마스크 검사 장치
JPH0475063A (ja) 露光装置
JPH10227721A (ja) 液晶パネルの検査方法および装置
JP3291591B2 (ja) 荷電粒子線描画露光方法及びその装置
JPH10289862A (ja) 搬送装置
KR19990063451A (ko) 마스크 로더를 가진 노광장치
JP2001021510A (ja) Ｘ線分析装置
JPH04215454A (ja) ウエハ用カセットの姿勢制御機構
JP3157212B2 (ja) 板状物搬送装置
JPH11124230A (ja) 基板搬送方法及び基板搬送装置
JPH11243127A (ja) 処理装置
JPH042490B2 (enrdf_load_stackoverflow)