JPS62128628U - - Google Patents

Info

Publication number
JPS62128628U
JPS62128628U JP1653186U JP1653186U JPS62128628U JP S62128628 U JPS62128628 U JP S62128628U JP 1653186 U JP1653186 U JP 1653186U JP 1653186 U JP1653186 U JP 1653186U JP S62128628 U JPS62128628 U JP S62128628U
Authority
JP
Japan
Prior art keywords
sample chamber
chamber
preliminary
lock valve
air lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1653186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1653186U priority Critical patent/JPS62128628U/ja
Publication of JPS62128628U publication Critical patent/JPS62128628U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Electron Beam Exposure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1653186U 1986-02-07 1986-02-07 Pending JPS62128628U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1653186U JPS62128628U (enrdf_load_stackoverflow) 1986-02-07 1986-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1653186U JPS62128628U (enrdf_load_stackoverflow) 1986-02-07 1986-02-07

Publications (1)

Publication Number Publication Date
JPS62128628U true JPS62128628U (enrdf_load_stackoverflow) 1987-08-14

Family

ID=30808471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1653186U Pending JPS62128628U (enrdf_load_stackoverflow) 1986-02-07 1986-02-07

Country Status (1)

Country Link
JP (1) JPS62128628U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102228A (en) * 1979-01-29 1980-08-05 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
JPS5759324A (en) * 1980-09-26 1982-04-09 Toshiba Corp Device for exposure of electron beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55102228A (en) * 1979-01-29 1980-08-05 Nippon Telegr & Teleph Corp <Ntt> Electron beam exposure device
JPS5759324A (en) * 1980-09-26 1982-04-09 Toshiba Corp Device for exposure of electron beam

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