JPH0260977B2 - - Google Patents

Info

Publication number
JPH0260977B2
JPH0260977B2 JP24056685A JP24056685A JPH0260977B2 JP H0260977 B2 JPH0260977 B2 JP H0260977B2 JP 24056685 A JP24056685 A JP 24056685A JP 24056685 A JP24056685 A JP 24056685A JP H0260977 B2 JPH0260977 B2 JP H0260977B2
Authority
JP
Japan
Prior art keywords
collimator lens
light
lens
slit
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP24056685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62100647A (ja
Inventor
Akira Oonishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON BUNSEKI KOGYO KK
Original Assignee
NIPPON BUNSEKI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON BUNSEKI KOGYO KK filed Critical NIPPON BUNSEKI KOGYO KK
Priority to JP24056685A priority Critical patent/JPS62100647A/ja
Publication of JPS62100647A publication Critical patent/JPS62100647A/ja
Publication of JPH0260977B2 publication Critical patent/JPH0260977B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/4133—Refractometers, e.g. differential

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP24056685A 1985-10-29 1985-10-29 示差屈折計 Granted JPS62100647A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24056685A JPS62100647A (ja) 1985-10-29 1985-10-29 示差屈折計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24056685A JPS62100647A (ja) 1985-10-29 1985-10-29 示差屈折計

Publications (2)

Publication Number Publication Date
JPS62100647A JPS62100647A (ja) 1987-05-11
JPH0260977B2 true JPH0260977B2 (enrdf_load_stackoverflow) 1990-12-18

Family

ID=17061426

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24056685A Granted JPS62100647A (ja) 1985-10-29 1985-10-29 示差屈折計

Country Status (1)

Country Link
JP (1) JPS62100647A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7027138B2 (en) * 2004-01-29 2006-04-11 Wyatt Technology Corporation Enhanced sensitivity differential refractometer incorporating a photodetector array
JP6547871B2 (ja) * 2018-04-06 2019-07-24 東京エレクトロン株式会社 基板処理装置及び基板処理方法

Also Published As

Publication number Publication date
JPS62100647A (ja) 1987-05-11

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