JPH0260245U - - Google Patents
Info
- Publication number
- JPH0260245U JPH0260245U JP14017088U JP14017088U JPH0260245U JP H0260245 U JPH0260245 U JP H0260245U JP 14017088 U JP14017088 U JP 14017088U JP 14017088 U JP14017088 U JP 14017088U JP H0260245 U JPH0260245 U JP H0260245U
- Authority
- JP
- Japan
- Prior art keywords
- image data
- data captured
- photomask blank
- sample
- storage time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 claims 3
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14017088U JPH0260245U (da) | 1988-10-26 | 1988-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14017088U JPH0260245U (da) | 1988-10-26 | 1988-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0260245U true JPH0260245U (da) | 1990-05-02 |
Family
ID=31404100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14017088U Pending JPH0260245U (da) | 1988-10-26 | 1988-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0260245U (da) |
-
1988
- 1988-10-26 JP JP14017088U patent/JPH0260245U/ja active Pending
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