JPH0220156U - - Google Patents
Info
- Publication number
- JPH0220156U JPH0220156U JP9806688U JP9806688U JPH0220156U JP H0220156 U JPH0220156 U JP H0220156U JP 9806688 U JP9806688 U JP 9806688U JP 9806688 U JP9806688 U JP 9806688U JP H0220156 U JPH0220156 U JP H0220156U
- Authority
- JP
- Japan
- Prior art keywords
- periodic pattern
- defect inspection
- inspected
- imaging
- imaging means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims 5
- 230000000737 periodic effect Effects 0.000 claims 5
- 230000007547 defect Effects 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 3
- 230000010354 integration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9806688U JPH0220156U (da) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9806688U JPH0220156U (da) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220156U true JPH0220156U (da) | 1990-02-09 |
Family
ID=31324000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9806688U Pending JPH0220156U (da) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220156U (da) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6315141A (ja) * | 1986-07-07 | 1988-01-22 | Kyodo Printing Co Ltd | 繰返しパタ−ンをもつ物品の検査方法及びその装置 |
-
1988
- 1988-07-25 JP JP9806688U patent/JPH0220156U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6315141A (ja) * | 1986-07-07 | 1988-01-22 | Kyodo Printing Co Ltd | 繰返しパタ−ンをもつ物品の検査方法及びその装置 |
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