JPS6228155U - - Google Patents

Info

Publication number
JPS6228155U
JPS6228155U JP11818585U JP11818585U JPS6228155U JP S6228155 U JPS6228155 U JP S6228155U JP 11818585 U JP11818585 U JP 11818585U JP 11818585 U JP11818585 U JP 11818585U JP S6228155 U JPS6228155 U JP S6228155U
Authority
JP
Japan
Prior art keywords
screen
inspected
projecting
onto
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11818585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11818585U priority Critical patent/JPS6228155U/ja
Publication of JPS6228155U publication Critical patent/JPS6228155U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11818585U 1985-08-02 1985-08-02 Pending JPS6228155U (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11818585U JPS6228155U (da) 1985-08-02 1985-08-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11818585U JPS6228155U (da) 1985-08-02 1985-08-02

Publications (1)

Publication Number Publication Date
JPS6228155U true JPS6228155U (da) 1987-02-20

Family

ID=31004400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11818585U Pending JPS6228155U (da) 1985-08-02 1985-08-02

Country Status (1)

Country Link
JP (1) JPS6228155U (da)

Similar Documents

Publication Publication Date Title
JPS6228155U (da)
JPS61199661U (da)
JPH0327343U (da)
JPS63175854U (da)
JPH0164057U (da)
JPH1144650A (ja) 円筒状ワークの外観検査装置
JPS60228908A (ja) 表面欠陥検査方法
JPH0310250U (da)
JPS62117559U (da)
JPH01179245U (da)
JPS5964559U (ja) 表面欠陥検査装置
JPH0279448U (da)
JPH02109241U (da)
JPS63159757U (da)
JPS62150612U (da)
JPH01118347U (da)
JPH0275583U (da)
JPH0352748U (da)
JPS5850414U (ja) 欠陥検出用投写装置
JPH01140817U (da)
JPS61203006U (da)
JPH043497B2 (da)
JPS6021957U (ja) 表面欠陥検査装置
JPS636439U (da)
JPH0279450U (da)