JPH0259648B2 - - Google Patents
Info
- Publication number
- JPH0259648B2 JPH0259648B2 JP58003782A JP378283A JPH0259648B2 JP H0259648 B2 JPH0259648 B2 JP H0259648B2 JP 58003782 A JP58003782 A JP 58003782A JP 378283 A JP378283 A JP 378283A JP H0259648 B2 JPH0259648 B2 JP H0259648B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- piezoelectric
- vibrating member
- vibrating
- surrounding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 230000005284 excitation Effects 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP378283A JPS59128814A (ja) | 1983-01-13 | 1983-01-13 | 圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP378283A JPS59128814A (ja) | 1983-01-13 | 1983-01-13 | 圧電振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59128814A JPS59128814A (ja) | 1984-07-25 |
| JPH0259648B2 true JPH0259648B2 (ro) | 1990-12-13 |
Family
ID=11566753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP378283A Granted JPS59128814A (ja) | 1983-01-13 | 1983-01-13 | 圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59128814A (ro) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000052821A1 (fr) * | 1999-03-01 | 2000-09-08 | Matsushita Electric Industrial Co., Ltd. | Dispositif de vibration piezo-electrique |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2577362B1 (fr) * | 1985-02-13 | 1987-04-17 | Ebauchesfabrik Eta Ag | Procede de fabrication de resonateurs a quartz a haute frequence |
| JPH057773Y2 (ro) * | 1986-06-30 | 1993-02-26 | ||
| JPH0253313A (ja) * | 1988-08-18 | 1990-02-22 | Fujitsu Ltd | 振動子 |
| JPH03139912A (ja) * | 1989-10-25 | 1991-06-14 | Nippon Dempa Kogyo Co Ltd | 圧電振動子 |
| JP2014075848A (ja) * | 2014-01-14 | 2014-04-24 | Seiko Epson Corp | 振動片および振動子 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827689A (ro) * | 1971-08-12 | 1973-04-12 | ||
| JPS5177087A (ja) * | 1974-12-27 | 1976-07-03 | Seiko Instr & Electronics | Atsumisuberiketsushoshindoshi |
| JPS5323588A (en) * | 1976-08-18 | 1978-03-04 | Matsushima Kogyo Kk | Quartz vibrator |
-
1983
- 1983-01-13 JP JP378283A patent/JPS59128814A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4827689A (ro) * | 1971-08-12 | 1973-04-12 | ||
| JPS5177087A (ja) * | 1974-12-27 | 1976-07-03 | Seiko Instr & Electronics | Atsumisuberiketsushoshindoshi |
| JPS5323588A (en) * | 1976-08-18 | 1978-03-04 | Matsushima Kogyo Kk | Quartz vibrator |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000052821A1 (fr) * | 1999-03-01 | 2000-09-08 | Matsushita Electric Industrial Co., Ltd. | Dispositif de vibration piezo-electrique |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59128814A (ja) | 1984-07-25 |
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