JPH0259580B2 - - Google Patents
Info
- Publication number
- JPH0259580B2 JPH0259580B2 JP58202205A JP20220583A JPH0259580B2 JP H0259580 B2 JPH0259580 B2 JP H0259580B2 JP 58202205 A JP58202205 A JP 58202205A JP 20220583 A JP20220583 A JP 20220583A JP H0259580 B2 JPH0259580 B2 JP H0259580B2
- Authority
- JP
- Japan
- Prior art keywords
- mesh electrode
- ion
- sample
- holding device
- sample holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 33
- 239000000284 extract Substances 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58202205A JPS6095844A (ja) | 1983-10-28 | 1983-10-28 | イオンマイクロアナライザ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58202205A JPS6095844A (ja) | 1983-10-28 | 1983-10-28 | イオンマイクロアナライザ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6095844A JPS6095844A (ja) | 1985-05-29 |
| JPH0259580B2 true JPH0259580B2 (en:Method) | 1990-12-12 |
Family
ID=16453700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58202205A Granted JPS6095844A (ja) | 1983-10-28 | 1983-10-28 | イオンマイクロアナライザ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6095844A (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0455764U (en:Method) * | 1990-09-21 | 1992-05-13 | ||
| JPH0650261U (ja) * | 1992-01-23 | 1994-07-08 | 京セラエルコ株式会社 | サーフェスマウント型ポストヘッダコネクタ |
-
1983
- 1983-10-28 JP JP58202205A patent/JPS6095844A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0455764U (en:Method) * | 1990-09-21 | 1992-05-13 | ||
| JPH0650261U (ja) * | 1992-01-23 | 1994-07-08 | 京セラエルコ株式会社 | サーフェスマウント型ポストヘッダコネクタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6095844A (ja) | 1985-05-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0259580B2 (en:Method) | ||
| LU92980B1 (en) | Extraction system for charged secondary particles for use in a mass spectrometer or other charged particle device | |
| JPS6093336A (ja) | レ−ザ微量分析装置 | |
| JPS6182653A (ja) | 四重極質量分析装置 | |
| JP3360114B2 (ja) | 角度分解・リターディング独立動作型入射レンズシステムを備えた電子分光器及び分光器を用いた分析方法 | |
| JPS60243958A (ja) | イオンビ−ム装置 | |
| LU92981B1 (en) | Extraction system for charged secondary particles for use in a mass spectrometer or other charged particle device | |
| Lovell et al. | Comparison of laser microprobe mass spectrometry (LMMS) and micro particle induced X-ray emission (micro-PIXE) for the analysis of senile plaques in Alzheimer's disease: A preliminary study | |
| JPH02288146A (ja) | 二次イオン質量分析装置 | |
| JPS6324616Y2 (en:Method) | ||
| JPH01132038A (ja) | 質量分析装置 | |
| JP2000123773A (ja) | 二次イオン質量分析装置 | |
| JP2574792B2 (ja) | 深さ方向の元素分布分析法 | |
| JPS5835345B2 (ja) | マイクロプロ−ブ二次イオン質量分析計 | |
| JPH0246893B2 (en:Method) | ||
| JP2715406B2 (ja) | 電子エネルギーアナライザ | |
| JPH0523409U (ja) | 質量分析装置 | |
| JPH02100256A (ja) | 二次イオン質量分析方法 | |
| JP2001056308A (ja) | セクタ型二次イオン質量分析方法及び試料ホルダ | |
| JPS5833643Y2 (ja) | 質量分析装置におけるイオンビ−ム電流検出装置 | |
| JPH06267496A (ja) | 二次イオン質量分析計 | |
| JPH03163743A (ja) | 電子分光分析装置 | |
| JPH0473259B2 (en:Method) | ||
| JPS6212464B2 (en:Method) | ||
| JPH07159352A (ja) | 二次イオン質量分析方法 |