JPH0258674A - Clean room - Google Patents

Abstract

PURPOSE:To enable dust to be high-precisely removed in a more narrow room by the more large number of workers by a method wherein a hand washing room is formed integrally with an air shower room to form one and the same room, and a hand washing tank and an air drier are mounted in the same place. CONSTITUTION:Plurality of hand washing tanks 4, water delivery ports 5 through which clean water is delivered, and air driers 6 located parallel to the water delivery port 5 are mounted to the inner wall on the one side of a clean room 9. A plurality of air discharge ports 7 through which clean air fed with the air of a fan and from a chamber room 8 is sprayed are mounted in an empty space of the wall to which the above devices are mounted and a wall on the opposite side to the wall. This constitution performs removal of dust by washing of hands, drying of hands, and air shower in one clean room 9 simultaneously with each other without movement of a worker.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a dust removal chamber for entering a semiconductor device manufacturing chamber.

[Conventional technology]

Conventionally, this type of dust removal room is a room used to remove dust from the clothes and bodies of workers before they enter a room that requires precision work such as manufacturing or assembling semiconductor devices. be.

FIG. 2 is a plan view of a dust removal chamber showing an example of a conventional dust removal chamber. Here, a procedure will be described in which a worker enters the dust removal room and removes dust from his clothes and body before entering the semiconductor device manufacturing and assembly room.

First, a worker enters the changing room 3 through the entrance/exit 10. Next, change your clothes into work clothes, change your shoes, and put on your hat. Next, enter the hand-washing room 1 from the entrance 1 and extend your hand under the spout 5. As a result, the sensor detects the hand and water flows out from the spout 5. Use this water to wash your hands and wash away debris from your hands. Next, reach under the air dryer 6. This allows the sensor to detect your hand,
Clean warm air is blown out from the air dryer 6 to dry the hands. Then, if necessary, put on the designated gloves.

Next, the air flows into the air Java chamber 9 through the entrance 12. Upon entering this room, a sensor on the floor of this room detects the worker's weight, and clean air supplied from the chamber 77 and chamber 8 is blown onto the worker's body from all sides through an air blowing lower. The dust removed by this spraying is absorbed by a filter (not shown) located under the floor. After a predetermined time, the air blowing ends and the worker enters the work room through the entrance 13.

1 Problems to be Solved by the Invention 11 1-The conventional dust removal room mentioned above is divided into a hand washing room and an air java room, so it takes time to enter the work room from the hand wash room, and it takes time for hand washing, drying and air java room. 3
There is a problem in that a worker must move through the steps and perform them in order, which is time-consuming.

Furthermore, after washing your hands, you expose your hands to a space where debris is floating, and by drying them in an air dryer,
Rather, it has the disadvantage of forcing dirt to adhere to it.

Another disadvantage is that the equipment occupies a large space in each room, making it impossible to use the room effectively.

An object of the present invention is to provide a dust removal chamber that can remove more dust and requires a smaller space.

[Means for Solving the Problems 1] The dust removal chamber of the present invention includes a plurality of L washing tanks each having a water outlet, an air dryer, and a plurality of air outlets for removing dust from clothes. A plurality of said hand-washing tanks arranged in a dust removal room, an air dryer arranged in line with said water outlet L1 of said hand-washing tank, and a plurality of air outlets provided in the same room in which said hand-washing tanks are arranged. It consists of:

[,Example〕 Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a plan view of a dust removal chamber without showing an embodiment of the present invention. Inside this dust removal chamber 0, on one side wall, there is a hand-washing tank 4, an outlet 5 through which clean water is discharged, and this outlet. Several air dryers 6 are installed in line with the outlet 5. Furthermore, in the open space in the wall where these hand-washing devices are installed, a plurality of air blowing lowers are installed to blow clean air sent from the fan and the chamber chamber 8. A plurality of air blowing lowers are also provided on the opposite wall facing this wall. In other words, the difference from the conventional one is that the conventional hand washing room and air Java room are in the same room. Furthermore, the hand washing tank 4 and air dryer 6, which were conventionally installed separately, are now installed at the same location.

Next, the procedure for a worker to enter the work room will be explained. First, the worker changes clothes in the changing room, which is the same as in the past. Next, the worker enters the dust removal chamber 9 through the entrance 12. Next, the worker stands in front of the hand-washing tank 4 and extends his hand under the spout 5.

As a result, the sensor detects the hand, and clean water flows from the spout 5. At the same time, clean air is blown from the air blowing lower to the front and back of the worker to remove any dirt adhering to the worker's body. When the specified time has passed, first,
The water from the spout 5 stops, and instead, clean warm air is blown out from the air dryer 6.

The worker extends his hand under the air dryer 6 to dry his hand without moving. On the other hand, the air blowing from the air blowing lower continues, and after a predetermined time has elapsed, the blowing is stopped. When this air blowing is finished, the worker enters the work room through the entrance 13.

As a result, when entering the work room after removing dust in a conventional dust removal room, the grade of dust in the work room ranges from -1 to 0 per cubic fee.
．． 57. The number of Zm particles was 300,000, but using this dust removal chamber, the number could be reduced to 100,000.

〔Effect of the invention〕

As explained above, the dust removal room of the present invention is integrated with the hand washing room and the air java room, and the worker can wash his hands, dry his hands, and remove dust using the air java at the same time in the same place without having to move. It is more effective in removing dust. Furthermore, since the hand purifier and the air outlet can be effectively arranged in the room, there is also the effect that dust removal can be carried out by a large number of workers in a smaller room.

[Brief explanation of the drawing]

FIG. 1 is a plan view of a dust removal chamber, not showing one embodiment of the present invention;
FIG. 2 is a plan view of a dust removal chamber showing an example of a conventional dust removal chamber. 1... Hand washing room, 2... Air Java room, 3... Changing room, 1... Hand washing tank, 5... Spout, 6... Air dryer, 7... Air outlet , 8...Fan and chamber chamber, 9...Dust removal chamber, 10...Entrance/exit, 11.12.
13...Entrance.

Claims (1)

[Claims] In a dust removal room comprising a plurality of hand washing tanks and an air dryer each having a water outlet, and a plurality of air outlets for removing dust from clothes, the plurality of hand washing tanks arranged in the dust removal room, and the hand washing tank are arranged in the dust removal room. A dust removal room comprising: an air dryer arranged in line with the water outlet; and a plurality of air outlets provided in the same room in which the hand washing tank is arranged.