JP3879052B2 - Parting booth for dust generation countermeasures - Google Patents

Description

[0001]
[Field of the Invention]
The present invention belongs to the technical field of a dust processing member processing booth employed in facilities and interior construction in high cleanliness buildings such as clean rooms.
[0002]
[Prior art]
For example, since the semiconductor market is an upfront investment industry, full-scale operation of a clean room is required as a customer need in as early a day as possible. As equipment and interior work in the clean room progresses, dust generation work in the room is prohibited from a certain point in time, and component processing and cutting work are performed in the dirty area outside the clean room as shown in Fig. 10, after processing and cutting Workers change the parts into simple dust-proof clothes and transport them to the semi-clean area of the clean room, where they clean the parts, and workers change to dust-proof clothes and transport them to the clean area where they lay the parts. Is the principle.
[0003]
[Problems to be solved by the invention]
However, it is difficult to thoroughly implement the above method, and there are problems such as loss of time due to changing clothes and movement, and a lot of waiting time for workers. Furthermore, when the process became strict, as shown in FIG. 11, a temporary booth surrounded by vinyl was unavoidably provided in the clean room, and there were places where work was performed, There is a problem that dust leaks and diffuses when the booth enters and exits. Also, piping work related to production equipment and restoration work in a clean room need to be done in a clean room where clean performance has been completed, but if the number of work items increases, the time required to transport parts and change clothes However, there is a problem that the construction period becomes strict and the cost increases.
[0004]
The present invention solves the above-mentioned conventional problems, and can ensure the quality in a strict process, and can improve the productivity and reduce the cost, and the dust processing member processing booth. The purpose is to provide.
[0005]
[Means for Solving the Problems]
Therefore, the present invention is a member processing booth having a front chamber and a member processing chamber divided and formed by a partition, and is provided in an air shower unit provided at an entrance of the front chamber and the member processing chamber. An exhaust unit , a booth frame formed by a frame, and a partition curtain made of an antistatic vinyl stretched on an upper surface and a side surface of the booth frame body, and an air supply below the partition curtain in the member processing chamber A screen is provided on the side of the member processing chamber facing the gap for use, and the exhaust unit keeps the chamber at a negative pressure so that dust inside the booth is prevented from flowing out of the booth . The material processing booth is unitized into a plurality of units.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 and 2 show one embodiment of a dust processing member processing booth according to the present invention, FIG. 1 is a schematic sectional view showing the overall configuration, and FIG. 2A is a front view of the member processing booth of FIG. FIG. 2 (B) is a plan view of FIG. 2 (A), and FIG. 2 (C) is a right side view of FIG. 2 (A).
[0007]
In FIG. 1, a member processing booth 2 is installed in a clean room 1. This member processing booth 2 is divided into a front chamber 3 and a member processing chamber 4 via a partition 7, an air shower unit 5 is provided at the entrance and exit of the front chamber 3, and indoor air is supplied to the member processing chamber 4. An exhaust unit 6 for discharging outside (in the clean room 1) is provided.
[0008]
The exhaust unit 6 incorporates a pre-filter (coarse dust filter) and a HEPA filter (ultra-high performance filter), so that the air flow in the member processing booth 2 passes through the partition 7 from the front chamber 3 side. The design is such that the differential pressure between the member processing booth 2 and the clean room 1 is 0.5 to 1 mmAq or more in the direction toward the member processing chamber 4 side.
[0009]
2 shows the front chamber 3, the member processing chamber 4, the air shower unit 5, and the exhaust unit 6 of the member processing booth 2 described in FIG. The member processing booth 2 includes a plurality of frames 9 and a partition curtain 10 made of an antistatic vinyl stretched on the upper surface and side surfaces of the booth frame body formed by the frames 9. A member loading / unloading port 11 is provided. An air supply gap 4 a shown in FIG. 8 is provided between the lower part of the partition curtain 10 and the floor of the clean room 1.
[0010]
According to the member processing booth 2 configured as described above, the worker who processes the member remains in the dust-proof clothing, changes to the general work clothing in the front chamber 3 through the air shower unit 5, enters the member processing chamber 4, and performs the processing work. Do. After the machining operation is completed, the process returns to the clean room 1 in the reverse procedure. Further, the member transporter enters the front chamber 3 in the dust-proof clothes, finishes the member transfer, cleans the member, and then transports and lays the member in the clean room 1. Therefore, according to the member processing booth 2 of the present invention, even if the clean room 1 is in a stage where the clean performance needs to be changed, it is necessary to change to dust-proof clothing, or even in a clean room that is in operation, Can be processed.
[0011]
FIG. 3 shows another embodiment of the present invention, showing an example in which the member processing booth 2 of FIG. 1 is unitized and a plurality of units are combined, and the number of units can be easily increased or decreased. The size of the member processing booth 2 can be made variable according to the size of the installation space, the degree of cleanliness, the work content, and the processing members.
[0012]
FIG. 4 shows the shape of the partition 7 in FIG. 1. In FIG. 4A, a slit 7a is formed in the lower part of the partition 7. In FIG. A hole 7b is formed. In order to quickly remove the dust generated in the member processing chamber 4, the shape of FIG. (B) is preferable, so that the air in the room does not stagnate and goes to the exhaust unit 6 more quickly. .
[0013]
FIG. 5 shows experimental results for confirming the performance of the member processing booth of the present invention. When the machining operation was performed in the member machining chamber, the amount of dust in the member machining chamber was increased, but there was almost no change outside the booth (in the clean room) even before the start of the operation even during the machining operation. FIG. 6 shows an example of a change in the cleanliness of the air in the member processing chamber immediately after the processing, and it has been found that the cleanliness of the air in the member processing chamber is improved in a short time.
[0014]
FIG. 7 is a schematic diagram showing another embodiment of the present invention, in which a circulation type fan filter unit (FFU) 12 is installed in the member processing chamber 4, the air volume of the exhaust unit 6 is reduced, and outside (in a clean room). By setting the amount of air leaking to the minimum for the negative pressure in the booth, dust can be removed safely and reliably. A local exhaust type suction device such as a vacuum cleaner may be provided.
[0015]
FIG. 8 is a schematic diagram showing another embodiment of the present invention, in which a screen 13 is provided on the member processing chamber 4 side so as to face the air supply gap 4a below the partition 10 of the member processing chamber 4. As shown in FIG. It is. Coarse dust scattered by the centrifugal force from the electric rotary tool may not be suppressed by the airflow flowing in from the air supply gap 4a below the booth but may flow out of the booth, but the screen 13 can prevent this. it can.
[0016]
The HEPA filter (ultra-high performance filter) in the exhaust unit 6 is greatly different from the normal use of clean air conditioning, and needs to be replaced at an appropriate time. In order to keep the booth performance appropriate at all times, it is important to determine an appropriate replacement time. Therefore, the following method is proposed as the means. First, the air volume is measured immediately after the start of the exhaust unit 6, and the value of the pressure loss at that time is recorded from the performance curve of the fan. Thereafter, the air volume is measured periodically, and it is determined that the HEPA filter is replaced when the air volume is reduced to an air volume equivalent to several times the initial pressure loss value (converted from the fan performance curve). If a chemical filter is provided in addition to the coarse dust filter, the medium performance filter, and the HEPA filter, the clean room will not be adversely affected even if painting work or the like is performed in the booth.
[0017]
FIG. 9 is a schematic view showing an application example of the present invention. By installing the exhaust unit 6 in the opposite direction, the member processing booth 2 can be used as a simple clean room.
[0018]
【The invention's effect】
As is apparent from the above description, according to the present invention, it is possible to ensure quality in a strict process, improve productivity, and reduce cost. In addition, it is particularly advantageous when it is not possible to secure a place where a processing plant is provided outside or for repair work.
[Brief description of the drawings]
FIG. 1 is a schematic cross-sectional view showing an overall configuration of an embodiment of a dust processing member booth according to the present invention.
2 (A) is a front view of the member processing booth of FIG. 1, FIG. 2 (B) is a plan view of FIG. 2 (A), and FIG. 2 (C) is a right side view of FIG. It is.
FIG. 3 is a schematic view showing another embodiment of the present invention.
4 is a diagram showing the shape of the partition in FIG. 1. FIG.
FIG. 5 is a diagram showing experimental results for confirming the performance of the member processing booth of the present invention.
6 is a diagram showing an example of a change in cleanliness of the air in the member processing chamber immediately after processing as in FIG.
FIG. 7 is a schematic view showing another embodiment of the present invention.
FIG. 8 is a schematic view showing another embodiment of the present invention.
FIG. 9 is a schematic diagram showing an application example of the present invention.
FIG. 10 is a schematic diagram for explaining conventional member laying in a clean room (case in which a member is taken out and processed in a dirty area).
FIG. 11 is a schematic diagram for explaining conventional member laying in a clean room (a case where a simple booth is provided in a clean room for processing.
[Explanation of symbols]
2 ... Member processing booth 3 ... Front chamber 4 ... Member processing chamber 5 ... Air shower unit 6 ... Exhaust unit 7 ... Partition, 7a ... Slit, 7b ... Opening hole 9 ... Frame 10 ... Partition curtain 12 ... Fan filter unit 13 ... screen

Claims (2)

A member processing booth having a front chamber and a member processing chamber divided and formed by an intermediate partition, an air shower unit provided at an entrance of the front chamber, an exhaust unit provided in the member processing chamber, and a frame A booth frame formed, and a partition curtain made of an antistatic vinyl stretched on the upper and side surfaces of the booth frame body , facing the air supply gap below the partition curtain of the member processing chamber The dust processing member processing is characterized in that a screen is provided on the member processing chamber side and the inside of the booth is prevented from flowing out to the outside of the booth by maintaining a negative pressure in the chamber by the exhaust unit. booth.   The member processing booth for dust generation according to claim 1, wherein the member processing booth is unitized to combine a plurality of units.

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