JPH0257000U - - Google Patents

Info

Publication number
JPH0257000U
JPH0257000U JP13604488U JP13604488U JPH0257000U JP H0257000 U JPH0257000 U JP H0257000U JP 13604488 U JP13604488 U JP 13604488U JP 13604488 U JP13604488 U JP 13604488U JP H0257000 U JPH0257000 U JP H0257000U
Authority
JP
Japan
Prior art keywords
gas
opening
airtight bag
piping section
gas piping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13604488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0616695Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13604488U priority Critical patent/JPH0616695Y2/ja
Publication of JPH0257000U publication Critical patent/JPH0257000U/ja
Application granted granted Critical
Publication of JPH0616695Y2 publication Critical patent/JPH0616695Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Devices For Use In Laboratory Experiments (AREA)
  • Drying Of Semiconductors (AREA)
JP13604488U 1988-10-18 1988-10-18 グローブ付気密袋 Expired - Lifetime JPH0616695Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13604488U JPH0616695Y2 (ja) 1988-10-18 1988-10-18 グローブ付気密袋

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13604488U JPH0616695Y2 (ja) 1988-10-18 1988-10-18 グローブ付気密袋

Publications (2)

Publication Number Publication Date
JPH0257000U true JPH0257000U (fr) 1990-04-24
JPH0616695Y2 JPH0616695Y2 (ja) 1994-05-02

Family

ID=31396191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13604488U Expired - Lifetime JPH0616695Y2 (ja) 1988-10-18 1988-10-18 グローブ付気密袋

Country Status (1)

Country Link
JP (1) JPH0616695Y2 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05223379A (ja) * 1992-02-07 1993-08-31 Daikin Ind Ltd 極低温冷凍機のメンテナンス装置
JP2007088166A (ja) * 2005-09-21 2007-04-05 Hitachi Kokusai Electric Inc 基板処理装置
JP2011011274A (ja) * 2009-06-30 2011-01-20 Mitsui Eng & Shipbuild Co Ltd 移動式グローブボックス
US8242562B2 (en) 2007-11-27 2012-08-14 Semiconductor Energy Laboratory Co., Ltd. Film deposition apparatus
JP2012519599A (ja) * 2009-03-06 2012-08-30 ディスポーザブル−ラボ 容器を充填するための手段を備えた使い捨てアイソレータ
CN104183520A (zh) * 2013-05-22 2014-12-03 株式会社堀场Stec 材料供给装置
JP2018501965A (ja) * 2014-09-08 2018-01-25 タレス ポッド修理ユニット

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05223379A (ja) * 1992-02-07 1993-08-31 Daikin Ind Ltd 極低温冷凍機のメンテナンス装置
JP2007088166A (ja) * 2005-09-21 2007-04-05 Hitachi Kokusai Electric Inc 基板処理装置
US8242562B2 (en) 2007-11-27 2012-08-14 Semiconductor Energy Laboratory Co., Ltd. Film deposition apparatus
JP2012519599A (ja) * 2009-03-06 2012-08-30 ディスポーザブル−ラボ 容器を充填するための手段を備えた使い捨てアイソレータ
JP2011011274A (ja) * 2009-06-30 2011-01-20 Mitsui Eng & Shipbuild Co Ltd 移動式グローブボックス
CN104183520A (zh) * 2013-05-22 2014-12-03 株式会社堀场Stec 材料供给装置
JP2014226610A (ja) * 2013-05-22 2014-12-08 株式会社堀場エステック 材料供給装置
JP2018501965A (ja) * 2014-09-08 2018-01-25 タレス ポッド修理ユニット

Also Published As

Publication number Publication date
JPH0616695Y2 (ja) 1994-05-02

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