JPH0257000U - - Google Patents
Info
- Publication number
- JPH0257000U JPH0257000U JP13604488U JP13604488U JPH0257000U JP H0257000 U JPH0257000 U JP H0257000U JP 13604488 U JP13604488 U JP 13604488U JP 13604488 U JP13604488 U JP 13604488U JP H0257000 U JPH0257000 U JP H0257000U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- opening
- airtight bag
- piping section
- gas piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 9
- 238000007599 discharging Methods 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010926 purge Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図ａは本考案の一実施例でボンベ接続状態
を示す正面図、第１図ｂは本考案の一実施例でボ
ンベ切り離し状態を示す正面図である。
１…気密袋地、２…ボンベのガス取り出し口、
３…第一の開口部、４…ガス配管の接続口、５…
第二の開口部、６…終端栓、７…グローブ、８…
透明部分、９…ガス導入口、１０…ガス排出口、
１１…ポケツト、１２…保持具、１３…開閉部、
１４…装置に接続する配管、１５…パージガス供
給用配管。
FIG. 1a is a front view showing an embodiment of the present invention in a cylinder connected state, and FIG. 1b is a front view showing an embodiment of the present invention in a cylinder disconnected state. 1...Airtight bag material, 2...Cylinder gas outlet,
3...First opening, 4...Gas piping connection port, 5...
second opening, 6...terminal plug, 7...globe, 8...
Transparent part, 9...Gas inlet, 10...Gas outlet,
11...Pocket, 12...Holder, 13...Opening/closing part,
14... Piping connected to the device, 15... Piping for supplying purge gas.
Claims (1)
もしくは、第１のガス配管部を収納する第一の開
口部と、 ガス配管の接続口を含むガス配管部、もしくは
、第１のガス配管部と接続あるいは切り離しする
第２のガス配管部を収納する第二の開口部と、 前記第一の開口部の一部の端から第二の開口部
の一部の端にわたり気密袋を開閉する開閉部と、 ２本の手による操作を、気密を保ちつつ、気密
袋内で行なうことを可能とする２個以上のグロー
ブと、 不活性ガスを気密袋内に導入するガス導入口と
、 気密袋内のガスを排出するガス排出口とを具備
したことを特徴とするグローブ付気密袋。[Scope of claim for utility model registration] The upper part of the cylinder, including the gas outlet of the cylinder;
Alternatively, a first opening that accommodates the first gas piping section and a gas piping section that includes a gas piping connection port, or a second gas piping section that is connected to or disconnected from the first gas piping section. a second opening for opening and closing the airtight bag from a partial end of the first opening to a partial end of the second opening; Equipped with two or more gloves that allow the operation to be carried out inside the airtight bag while maintaining the airtight bag, a gas inlet for introducing inert gas into the airtight bag, and a gas outlet for discharging the gas inside the airtight bag. An airtight bag with gloves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13604488U JPH0616695Y2 (en) | 1988-10-18 | 1988-10-18 | Airtight bag with gloves |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13604488U JPH0616695Y2 (en) | 1988-10-18 | 1988-10-18 | Airtight bag with gloves |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257000U true JPH0257000U (en) | 1990-04-24 |
| JPH0616695Y2 JPH0616695Y2 (en) | 1994-05-02 |
Family
ID=31396191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13604488U Expired - Lifetime JPH0616695Y2 (en) | 1988-10-18 | 1988-10-18 | Airtight bag with gloves |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616695Y2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05223379A (en) * | 1992-02-07 | 1993-08-31 | Daikin Ind Ltd | Maintenance device for cryogenic freezer |
| JP2007088166A (en) * | 2005-09-21 | 2007-04-05 | Hitachi Kokusai Electric Inc | Substrate treatment equipment |
| JP2011011274A (en) * | 2009-06-30 | 2011-01-20 | Mitsui Eng & Shipbuild Co Ltd | Mobile glove box |
| US8242562B2 (en) | 2007-11-27 | 2012-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Film deposition apparatus |
| JP2012519599A (en) * | 2009-03-06 | 2012-08-30 | ディスポーザブル−ラボ | Disposable isolator with means for filling containers |
| CN104183520A (en) * | 2013-05-22 | 2014-12-03 | 株式会社堀场Stec | Material supplying device |
| JP2018501965A (en) * | 2014-09-08 | 2018-01-25 | タレス | Pod repair unit |
-
1988
- 1988-10-18 JP JP13604488U patent/JPH0616695Y2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05223379A (en) * | 1992-02-07 | 1993-08-31 | Daikin Ind Ltd | Maintenance device for cryogenic freezer |
| JP2007088166A (en) * | 2005-09-21 | 2007-04-05 | Hitachi Kokusai Electric Inc | Substrate treatment equipment |
| US8242562B2 (en) | 2007-11-27 | 2012-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Film deposition apparatus |
| JP2012519599A (en) * | 2009-03-06 | 2012-08-30 | ディスポーザブル−ラボ | Disposable isolator with means for filling containers |
| JP2011011274A (en) * | 2009-06-30 | 2011-01-20 | Mitsui Eng & Shipbuild Co Ltd | Mobile glove box |
| CN104183520A (en) * | 2013-05-22 | 2014-12-03 | 株式会社堀场Stec | Material supplying device |
| JP2014226610A (en) * | 2013-05-22 | 2014-12-08 | 株式会社堀場エステック | Material feeding device |
| JP2018501965A (en) * | 2014-09-08 | 2018-01-25 | タレス | Pod repair unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0616695Y2 (en) | 1994-05-02 |
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