JPH0254405A - Magnetic head - Google Patents

Abstract

PURPOSE:To produce the head having good recording efficiency at a good yield by forming alloy films having prescribed compsns. to a desired thickness onto a ferrite substrate of the magnetic head consisting of the alloy film essentially consisting of Fe Al Si near the gap. CONSTITUTION:The Fe-Si alloy film 12 is formed to 0.1mum and the thin Fe Al Si film 13 to 10mum successively by sputtering on a ferrite substrate 11 subjected to polishing and chemical etching. Tracks 17 are worked on a composite bar 14 formed in such a manner. Two pieces of such bars are combined as one set and the one bar 14 is worked with a winding window. SiO2 or the like is formed on the gap surface 19. The gap is formed by combining two pieces of such bars 14 as one set and glass 25 is put into the part of the winding window and is poured into the grooves of the tracks 17. The gap bar 16 formed in such a manner is subjected to chip slicing by the cutting lines shown by chain lines 18a-18h, by which the magnetic head having a desired shape is obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head suitable for recording information at high density on a high coercive force magnetic recording medium used in a VTR, DAT, FDD, or the like.

Conventional technology In high-density magnetic recording and reproduction, it is generally known that it is advantageous to increase the coercive force of the recording medium, but in order to record information on a recording medium with high coercive force, a strong magnetic field is required. Become. Ferrite material, which is the mainstream material for head cores, has a saturation magnetic flux density of about 4,000 to 5,000 Gauss, so if the magnetic recording medium has a coercive force of 1,000 Oe or more (for example, a metal tape), recording will be insufficient. There is a drawback.

Therefore, CoNb, which has a higher saturation magnetic flux density than ferrite,
Co-based amorphous alloys such as Zr and CoNbTaZr are used. However, even in these amorphous magnetic alloys, in order to increase the saturation magnetic flux density, Ca1 in the alloy must be
It is necessary to increase l. On the other hand, increasing the amount of Co lowers the crystallization temperature of the amorphous alloy, which hinders the manufacture of heads that require many heat treatment steps.
Magnetic helads can only be manufactured using amorphous alloys that exhibit a saturation magnetic flux density of about 0 Gauss or less.

Therefore, Sendust (FeAj!St) alloy, which exhibits a saturation magnetic flux density of 10,000 Gauss or more, is used as the head material (for example, the 9th Japan Society of Applied Magnetics, Academic Conference Abstracts, 29pA-2), and the shape of the magnetic head. As shown in Fig. 2(a), the main core is made of ferrite and only the vicinity of the gap is made of Sendust thin film with high saturation magnetic flux density.As shown in Fig. 2(b), the auxiliary core is a There is a type of head that uses ferrite and has a sand inch Sendust film serving as a track.In both cases, it is necessary to deposit Sendust yIWA to a thickness of about 10 μm or more on a ferrite substrate.

Problems to be Solved by the Invention However, FeAlSi alloy F! When a film of about 10 μm is formed on a ferrite substrate and heat-treated at about 600°C to improve the soft magnetic properties of the FeAlSi alloy, F
The eAl5t alloy film peels off from the ferrite. Something as intense as this is FeAj! The Si alloy film peels off the ferrite.

This is FeAj! A in S1 alloy! reacts with ferrite to form FeA/! This is because these reaction layers (Al2O2, etc.) are formed at the boundary between the Si alloy film and the ferrite. The coefficient of thermal expansion of these reaction layers is FeAj! Since it is smaller than the Si bond, a large strain occurs at the boundary, causing peeling.

In addition, even if separation does not occur, these reaction layers cause a pseudo gap in Figure 2 (a), a deterioration of the recording and reproducing characteristics due to the deterioration of the characteristics of the initially formed film in Figure 2 (a), and adversely affect the magnetic head. affect

Furthermore, even when forming a FeAlSi alloy film on a non-magnetic oxide substrate, large strain occurs at the boundary between the two, so
Al! , phenomena such as deterioration of characteristics of the initially formed St alloy film and peeling of the film appear, which adversely affects the magnetic head.

Means to solve problems FeAj! When producing an SL alloy thin film, an Fe-based alloy film is first formed on a ferrite substrate or a nonmagnetic oxide substrate, and then an FeAl1Si alloy film is formed to a desired thickness.

action The effect of this technical means is as follows.

Ferrite or non-magnetic oxide substrate and FaAffiS
A Fe alloy thin film is formed at the boundary of the i alloy film to prevent a reaction between the two.

By forming an Fe-based alloy film on a ferrite or non-magnetic oxide substrate, the characteristics of the initially formed film of FeAlSi alloy can be significantly improved. Also Fe, 6/! SL alloy its
By preventing the formation of a reaction layer at the boundary between the ferrite and the FeAlSi alloy film on the ferrite substrate,
It becomes possible to form the above.

As a result, it is possible to reduce phenomena such as pseudo gaps, deterioration of recording/reproducing characteristics, and increase in distortion that appeared in the head of FIG. 2.

EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings.

FIG. 1(a) shows an example of a magnetic head formed according to the present invention. FeAl15 with high saturation magnetic flux density near the gap
! This is a so-called MIG type head using an alloy film W41 mainly composed of , and using ferrite 2 for the other magnetic paths. In this example, the thickness of the alloy thin film 1 is 10 μm.

Note that 3 is glass. Fee of 0.1μm thickness, 9
1Si 6. . (all compositions below are weight ratios) An alloy film 4 is formed between the ferrite 2 and the alloy thin film 1.

In the conventional example, the pseudo gap effect of -10 dB (IMHz) is Fee1□Sin. By using the 1 alloy film 4, it was reduced to -24 dB (IM) Iz).

FIG. 1(b) shows an example of a magnetic head formed according to the present invention. The main core is an alloy film 5 mainly composed of FeAffiSi. This thickness is the track width. Here, the track width was set to 20 μm. The auxiliary core is the ferrite 6, and the material between them is the ferrite 6 with a thickness of 0.
1 μm Fe0. wzsio, oa alloy film 7.

Conventionally, it was very difficult to deposit a 20 μm thick FeAj2Si alloy film on ferrite, but this method has made it possible.

FIG. 1(C) is an example of a magnetic head formed according to the present invention. The main core is FeAj! An alloy film 5 mainly composed of Si is sandwiched between non-magnetic ceramic substrates 9. The thickness between 5 and 9 is 0.
It is a 1 μm Fe++, qzsio, os alloy film 7. In this example, FeAj! The thickness of the Si alloy thin film forms a track.

By improving the characteristics of the initially formed film, the recording and reproducing characteristics improved by 1 dB (0
, 1M7~5M7) has been uploaded.

FIG. 3 is an example of a method of manufacturing a magnetic head according to the present invention.

In Fig. 3(a), Fe-Si is first deposited on a ferrite substrate lI which has been polished and chemically etched and has no magnetically degraded layer.
The alloy film layer 12 is formed to a thickness of 0.1/7 m, and the FeAlSi alloy thin film 13 is formed to a thickness of 10 μm by a spunter method.

This sample will be referred to as a composite bar 14.

The composition of Fe-5t is expressed as Pea, qr in weight% here.
Sto, O8 was used. The substrate temperature during sputtering is 20
The temperature was set to 0°C. It is desirable to form the film 12.13 without breaking the vacuum.

3), the composite bar 14 formed in FIG. 3(a) is subjected to track processing, and the number of tracks is 17.

Further, two bars are set as 1&ll, and at least one of the bars is processed with a winding window, and then a desired amount of SiO2 and glass (not shown in the figure) is formed as a gap material on the gap surface 19.

In FIG. 3(C), a gap is formed by using the two bars formed in FIG. 3(+) as one set. A glass 15 is placed in the winding window portion, and this glass is poured into the track groove. The completed bar will be referred to as a gap bar 16. Gap formation conditions are maximum temperature 600℃, C1 holding time 1 hour, N2
In FIG. 3(d), which is performed in an atmosphere, chip slicing is performed on the gapper 16. A magnetic head with the desired shape is completed. 18a-b are cutting lines.

FIG. 4 shows an example of a method for manufacturing a magnetic head manufactured according to the present invention.

In FIG. 4(a), grooves of a predetermined width are formed at predetermined intervals in a MnZn-ferrite substrate 21, and two composite substrates each having glass 22 formed in the groove portions form a set. First, a Fe-Si alloy film 24 with a thickness of 0.1 μm and FeA
A j2S i alloy film 25 of 20 μm thickness is formed (when making a magnetic head with a track width of 20 μm). At this time, an insulator (for example, SiO
□ (omitted in the figure) and FeAj! It is desirable to have a laminated structure with an St alloy.

The composition of Fe-3i is expressed here in weight% Fee, qts
lo, o.

was used. The substrate temperature during sputtering was 200°C.

It is desirable to form the films 24 and 25 without breaking the vacuum.

A glass layer 26 having a thickness of 2 μm is formed on the other substrate.

In FIG. 4 [ex.]), the two substrates made in FIG. 4(a) are bonded under heat and pressure in an electric furnace at about 600° C. to produce a composite block 27. At this time, it is desirable to carry out in a nitrogen atmosphere.

In FIG. 4(C), this composite block is cut into strips, two bars 28 and 29 are set as 1&ll, and one bar is processed with winding grooves, etc., and 30a-e are cutting lines.

In FIG. 4(d), after polishing the abutting surfaces (gap surfaces) of the two bars 28 and 29, SiO□ and glass (
(both are omitted from the figure) are sequentially formed by sputtering and bonded under pressure and heat in an electric furnace to form the head bar 32. The temperature at this time is preferably about 560° C., which is slightly lower than this temperature, so that the bonding performed in step (b) does not loosen.

Thereafter, the head bar 32 is appropriately cut to complete the magnetic head. 33a-c are cutting lines.

FIG. 5 shows an example of a method for manufacturing a magnetic head manufactured according to the present invention.

In FIG. 5(a), two nonmagnetic oxide substrates 41 are used as a set, and a Fe-Si alloy film 42 is first coated on one substrate 4.
．． 1 pm, FeAj! Si alloy 1lI43 20μ
m (when making a magnetic head with a track width of 20 μm), at this time, an insulator (for example, 5i02 (not shown)) and FeAf are used to improve the magnetic properties in the high frequency range.
It is desirable to have a laminated structure with fiS1 alloy.

The composition of Fe-5i is expressed here as Fee, 9!
510. . .

was used. The substrate temperature during sputtering was 200°C.

It is desirable to form the film 42.43 without breaking the vacuum.

A glass layer 44 having a thickness of 2 μm is formed on the other substrate.

In FIG. 5(c), the two substrates made in FIG. 5(a) are bonded under heat and pressure at about 600° C. in an electric furnace to produce a composite block 45. At this time, it is desirable to carry out in a nitrogen atmosphere.

In Fig. 5(C), this composite block is cut into strips, and two bars 46.4'7 are used as one set. Each bar is machined with winding grooves, etc. 43a-e are cutting lines. be.

In Fig. 5(d), after polishing the abutting surfaces (gap surfaces) of the two bars 46 and 47, this surface is polished with 5i (h) and glass (
(both are omitted from the figure) are sequentially formed by sputtering and bonded under pressure and heat in an electric furnace to form the head par 50. The temperature at this time is preferably about 560''C, which is slightly lower than this temperature, so that the bonding made in step (b) does not loosen.

Thereafter, the head par 50 is appropriately cut to complete a magnetic head. 51a-b are cutting lines.

In one embodiment of the present invention, the composition of the Fe-based alloy film is 211
% of Fe61□Si. , but there is no problem with other compositions within the following range.

exXy (However, X is Si, Mo, Nb, Ta, Zr.

0.60≦X≦0.99 0401≦y≦0.40 (However, at%) Therefore, for example, Fee, wzSie, os+PE1o ,wJ
ue, ++m+Fee, wiTi*, *s+ Fe+
, qxGee, oc+ Fee, *1Auo, os+
Fe@, w寞Age, @It Fes, Shizuku x Pdo,
at+Fee, *oS+o, eJOo, st,
Fee, *o5ia, o-Ruo, e wealth + Fee
, *oSie, esTae, ot+ Fee, *J
uo, osτa@, OZ+Pea, 5sSie, +s+
Fee, wsRuo, +s+ Feo, 5sTio,
+s.

Fee, 5ssia, +oRu*, Ill pe
,, 5ssi*, +Jb+, *s*F@@, @
@S1 @, I oMo,, lls, F'l@-as
Si@, I OTa*-118+Fee, wests
, tJbe, esTae, ms+Feo, aos
io, +oZro, asNbo, os+Fee, l11
stl +oTa6. osTio, os.

Feo, 5oSlo, +OMoo, asTio, as+
Feo, 5alluo, +. Tle, +o, Fe+,
*oRuo, l5M0o, +5Tie, +1Fe6.
hosIo, +5Ru6. + Jbo, + o
ferrite or non-magnetic oxide substrate and Fe
A/! A similar effect can be obtained even if it is provided at the boundary with the St alloy.

Further, although a film thickness of 0.1 .mu.m was used here, a thickness of 0.03 .mu.m is sufficient to prevent reactions.

Effect of the invention The magnetic head according to the present invention can be used, for example, in a VTR.

FeAj with high saturation magnetic flux density as core material for DAT and FDD heads! A Si alloy thin film can be used, and a magnetic head with excellent recording efficiency can be manufactured at a higher yield than ever before.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of the magnetic head of the present invention, Fig. 2 is a perspective view showing an embodiment of a conventional magnetic head, Figs.
5A and 5B are process diagrams of a method for manufacturing a magnetic head according to the present invention. 1...Alloy thin film, 2.6...Ferrite, 3...Glass, 4...Pa@, q
tsia,. 6 Alloy film, 5... Alloy film mainly composed of FeAlSi, 7... Fee, wzsie, as alloy film with a thickness of 0.1 μm, 9...
Non-magnetic ceramic substrate. Name of agent: Patent attorney Shigetaka Awano Figure 1 Figure f-・Membrane 2-1-Fura 4 Figure Figure Be

Claims (1)

[Claims] (1) The main core is made of ferrite, and the vicinity of the gap is made of FeAl.
In a magnetic head made of an alloy film mainly composed of Si, a Fe_xM_y alloy film is formed on a ferrite substrate to a thickness of 0.03 μm to 1.0 μm, and the above-mentioned alloy film mainly composed of FeAlSi is formed to a desired thickness on top of the Fe_xM_y alloy film. A magnetic head characterized by: However, M is Si, Mo, Nb, Ta, Zr, Ru, Ti,
Consisting of one or more alloys of Ge, Au, Ag, and Pd,
In addition, x, y, and z are expressed in weight ratio as follows: 0.60≦X≦0.99 0.01≦Y≦0.40 X+Y=1. (2) A Fe_xM_y alloy film with a thickness of 0.03 μm to 1.0 μm is formed on a nonmagnetic oxide substrate or a ferrite substrate, and an alloy film containing FeAlSi as the main component is formed on top of it to a desired thickness. A magnetic head characterized by: However, M is made of one or more alloys of Si, Mo, Nb, Ta, Zr, Ru, Ti, Ge, Au, Ag, and Pd, and x, y, and z are 0.60≦X≦0 in terms of weight ratio. .99 0.01≦Y≦0.40 X+Y=1.