JPH0253951B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a composite ceramic component constituting a capacitor and a method for manufacturing the same.

Conventionally, capacitors have been formed on a substrate made of ceramic or the like with a wiring layer, placed between wiring conductors, and soldered to form an electronic circuit. However, with this method, each chip type or disk type capacitor must be installed one at a time. On the other hand, in recent years, attempts have been made to form electronic circuits including capacitors and the like inside substrates using hybrid technology. That is, dielectric layers and internal electrodes for the capacitor are alternately formed on a ceramic substrate made of alumina or the like by screen printing, and then an insulating layer that becomes the surface of the substrate is formed and fired to form the capacitor. . However, in this case, the number of steps for printing each pattern increases, resulting in poor workability. In addition, the dielectric constant of the dielectric material is small;
Furthermore, as printing layers are repeated, the flatness of the printing rate becomes extremely poor, making it difficult to increase the number of layers, making it impossible to form a capacitor with a large capacity. On the other hand, there is also a method of forming a capacitor inside a substrate using an alumina green sheet. FIG. 1 is a schematic cross-sectional view of a substrate containing a capacitor formed by this method. Screen printing is performed to form an internal electrode layer for a capacitor on an alumina green sheet, and a plurality of alumina green sheets 3 with the electrode layer provided thereon and alumina green sheets 1 to be thickened as necessary are laminated. 1500～
The ceramic composite part constituting the capacitor 4 was obtained by firing at a high temperature of 1600° C. and in a reducing atmosphere. In this method, a high temperature of 1500 to 1600°C is required to sinter the alumina material, so high melting point metals such as W and Mo must be used as conductor materials, and oxidation of these metals is necessary. Since firing is performed in a reducing atmosphere to prevent
The disadvantages are that the cost of creating an atmosphere is high and the equipment is also large-scale. Furthermore, since the dielectric constant of alumina is about 9, the capacitance of this capacitor is also small.
Furthermore, in order to improve the bonding properties of the external lead terminal part of the composite ceramic part, Au,
It was necessary to plate precious metals such as Ag, which increased the number of steps involved, and there was a risk that the reliability of the parts would be impaired due to corrosion or migration caused by the plating solution.

The purpose of the present invention is to eliminate these conventional drawbacks, and to develop a dielectric material and gas ceramics as main components that have a high dielectric constant and can be fired at lower temperatures (below 1300°C) and in an oxidizing atmosphere than conventional ones. Au, Ag, Pt,
It is now possible to use Pd, etc., and alloys containing one or more of these, and the method of producing multilayer ceramic substrates using ordinary green sheets has good workability, good flatness, and simultaneous firing, and only the firing process is required. It is an object of the present invention to provide a novel capacitor composite laminated ceramic part having a large capacity and having good bonding properties such as soldering, and a method for manufacturing the same.

That is, the present invention uses a lead-based composite perovskite high dielectric constant material, 40 to 60 wt% of aluminum oxide, 1 to 40 wt% of lead oxide, 2 to 40 wt% of silicon oxide,
1-30wt% boron oxide, 0.05% group element oxide
~25wt%, 0.01~10wt% of oxides of group elements (excluding carbon, silicon, and lead), totaling 100wt
It is a laminated sintered body formed by integrally laminating and firing an insulator and a conductor mainly composed of glass ceramics with a composition of An invention of a composite laminated ceramic component characterized by comprising one or more capacitor elements constituted by a conductor, a process for producing a lead-based composite perovskite high dielectric constant material paste and a conductor paste, and an aluminum oxide 40-60wt%, lead oxide 1-40wt%, silicon oxide 2-40wt%, boron oxide 1-30wt%,
0.05-25wt% of group element oxides, 0.01-10wt of group element oxides (excluding carbon, silicon, and lead)
%, a step of producing an insulating green sheet mainly composed of glass ceramics with a composition of 100 wt% in total, a step of forming through holes in the insulating green sheet mainly composed of glass ceramics, and a pre-filling step. A step of filling conductive paste into the through holes of an insulating green sheet mainly composed of glass ceramics, filling the through holes of the insulating green sheet mainly composed of glass ceramics with conductive paste and at the same time filling the conductive paste onto the sheet. In the process of forming a conductor paste and a lead-based composite perovskite high dielectric constant material paste on an insulating green sheet mainly composed of glass ceramics, the high dielectric constant material is sandwiched between the conductors, and the sandwiched conductors face each other. In the step of forming a capacitor electrode, the insulator green sheet, which is mainly made of glass ceramics and which has been coated with each paste, is printed with a high dielectric constant material, the conductor of which is formed as a counter electrode. This invention relates to a method for manufacturing a composite laminated ceramic part, characterized by comprising steps of forming, laminating, and firing a composite laminated ceramic part.

The present invention will be described in detail below based on examples.

2 to 9 are diagrams showing the manufacturing method of the present invention, and FIG. 10 is a schematic cross-sectional view of a composite laminated ceramic component of the present invention produced in an example.

The insulator green sheet 11 shown in Figure 2 contains 40 to 60 wt% aluminum oxide and 1 to 40 wt% lead oxide.
%, silicon oxide 2-40wt%, boron oxide 1
~30wt%, group element oxides 0.05~25wt%,
An inorganic powder that can be sintered at around 900℃ with a composition of 0.01 to 10 wt% of oxides of group elements (excluding carbon, silicon, and lead), for a total of 100 wt%, is mixed with an organic solvent such as ethyl celselv and plasticizer. After mixing with PVB as agent and binder to form a slurry, it is cast into a film of 60mm x 40mm and 100μm thick.
It was created by punching a sheet. On the other hand, the dielectric paste is Pb (Fe2/3・W1/3) ₀

Claims (1)

[Claims] 1. 40 to 60 wt% of lead-based composite perovskite high dielectric constant material and aluminum oxide, and 1 to 40 wt% of lead oxide.
%, silicon oxide 2-40wt%, boron oxide 1
~30wt%, group element oxides 0.05~25wt%,
An insulator and conductor whose main component is glass ceramics with a composition of 0.01 to 10 wt% of oxides of group elements (excluding carbon, silicon, and lead) and a total of 100 wt% are laminated and fired. A composite laminated ceramic component comprising a laminated sintered body comprising a wiring conductor layer and one or more capacitor elements constituted by the high dielectric constant material and the conductor. . 2. Process of producing lead-based composite perovskite high dielectric constant material paste and conductor paste, 40 to 60 wt% aluminum oxide, 1 to 40 wt% lead oxide, 2 to 40 wt% silicon oxide, and 1 to 30 wt% boron oxide.
%, group element oxides from 0.05 to 25wt%, group element oxides (excluding carbon, silicon, and lead)
A step of producing an insulating green sheet mainly composed of glass ceramics with a composition of 0.01 to 10 wt%, giving a total of 100 wt%, and a step of forming through holes in the insulating green sheet mainly composed of glass ceramics. , filling the through holes of the insulating green sheet mainly composed of glass ceramics with a conductive paste; filling the through holes of the insulating green sheet mainly composed of glass ceramics with the conductive paste and simultaneously filling the through holes on the sheet; In the step of forming a conductor paste, the conductor paste and the lead-based composite perovskite high dielectric constant material paste are sandwiched between the conductors and the high dielectric constant material is sandwiched between the insulator green sheet mainly composed of glass ceramics, and the sandwiched conductor is formed. A step of forming the insulating green sheet mainly composed of glass ceramics on which each paste has been formed into a sheet printed with a high dielectric constant material formed so that the conductor becomes the opposing electrode. 1. A method of manufacturing a composite laminated ceramic component, comprising the steps of configuring, laminating, and firing to form a capacitor.