JPH025255B2 - - Google Patents

Info

Publication number
JPH025255B2
JPH025255B2 JP56170240A JP17024081A JPH025255B2 JP H025255 B2 JPH025255 B2 JP H025255B2 JP 56170240 A JP56170240 A JP 56170240A JP 17024081 A JP17024081 A JP 17024081A JP H025255 B2 JPH025255 B2 JP H025255B2
Authority
JP
Japan
Prior art keywords
diaphragm
flange
electrode
pressure sensor
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56170240A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57149933A (en
Inventor
In Rii Shii
Kei Buriifuaa Denisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Setra Systems Inc
Original Assignee
Setra Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Setra Systems Inc filed Critical Setra Systems Inc
Publication of JPS57149933A publication Critical patent/JPS57149933A/ja
Publication of JPH025255B2 publication Critical patent/JPH025255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP56170240A 1980-10-27 1981-10-26 Capacitive pressure sensor Granted JPS57149933A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/200,788 US4358814A (en) 1980-10-27 1980-10-27 Capacitive pressure sensor

Publications (2)

Publication Number Publication Date
JPS57149933A JPS57149933A (en) 1982-09-16
JPH025255B2 true JPH025255B2 (OSRAM) 1990-02-01

Family

ID=22743186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56170240A Granted JPS57149933A (en) 1980-10-27 1981-10-26 Capacitive pressure sensor

Country Status (5)

Country Link
US (1) US4358814A (OSRAM)
JP (1) JPS57149933A (OSRAM)
DE (1) DE3142387A1 (OSRAM)
FR (1) FR2492978A1 (OSRAM)
GB (1) GB2086058B (OSRAM)

Families Citing this family (65)

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US4493219A (en) * 1982-08-02 1985-01-15 Illinois Tool Works, Inc. Force transducer
US4852466A (en) * 1987-05-15 1989-08-01 The Foxboro Company Floating diaphragm apparatus
SE461300B (sv) * 1988-05-17 1990-01-29 Hydrolab Ab Tryckmaetare
JP2639159B2 (ja) * 1989-04-14 1997-08-06 富士電機株式会社 静電容量式差圧検出器
US5020377A (en) * 1990-01-23 1991-06-04 Kavlico Corporation Low pressure transducer using metal foil diaphragm
US5150275A (en) * 1991-07-01 1992-09-22 Setra Systems, Inc. Capacitive pressure sensor
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
US5542300A (en) * 1994-01-24 1996-08-06 Setra Systems, Inc. Low cost, center-mounted capacitive pressure sensor
US5604315A (en) * 1995-01-12 1997-02-18 Setra Systems, Inc. Apparatus using a feedback network to measure fluid pressures
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6568274B1 (en) 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6295875B1 (en) 1999-05-14 2001-10-02 Rosemount Inc. Process pressure measurement devices with improved error compensation
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
US7047814B2 (en) * 2001-07-17 2006-05-23 Redwood Microsystems, Inc. Micro-electromechanical sensor
US6807865B2 (en) * 2002-02-04 2004-10-26 Dwyer Instruments, Inc. Pressure sensor with a radially tensioned metal diaphragm
US6839546B2 (en) 2002-04-22 2005-01-04 Rosemount Inc. Process transmitter with wireless communication link
US6718827B1 (en) * 2002-11-15 2004-04-13 Setray Systems, Inc. Center-mount capacitive sensor with overload protection
US6768958B2 (en) * 2002-11-26 2004-07-27 Lsi Logic Corporation Automatic calibration of a masking process simulator
US7570065B2 (en) * 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
US7353713B2 (en) 2003-04-09 2008-04-08 Loadstar Sensors, Inc. Flexible apparatus and method to enhance capacitive force sensing
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US8145180B2 (en) 2004-05-21 2012-03-27 Rosemount Inc. Power generation for process devices
US8160535B2 (en) 2004-06-28 2012-04-17 Rosemount Inc. RF adapter for field device
US7262693B2 (en) 2004-06-28 2007-08-28 Rosemount Inc. Process field device with radio frequency communication
JP2008514929A (ja) * 2004-09-29 2008-05-08 ロードスター センサーズ、インク． 容量技術を用いた間隙変化の検出
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7680460B2 (en) 2005-01-03 2010-03-16 Rosemount Inc. Wireless process field device diagnostics
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
US20060267321A1 (en) * 2005-05-27 2006-11-30 Loadstar Sensors, Inc. On-board vehicle seat capacitive force sensing device and method
US7334484B2 (en) * 2005-05-27 2008-02-26 Rosemount Inc. Line pressure measurement using differential pressure sensor
RU2389056C2 (ru) 2005-06-27 2010-05-10 Роузмаунт Инк. Полевое устройство с радиочастотной связью, в которой потребляемая мощность динамически регулируется
US7379792B2 (en) * 2005-09-29 2008-05-27 Rosemount Inc. Pressure transmitter with acoustic pressure sensor
US7415886B2 (en) * 2005-12-20 2008-08-26 Rosemount Inc. Pressure sensor with deflectable diaphragm
US7308830B2 (en) * 2006-01-26 2007-12-18 Rosemount Inc. Pressure sensor fault detection
US7343814B2 (en) * 2006-04-03 2008-03-18 Loadstar Sensors, Inc. Multi-zone capacitive force sensing device and methods
US20090015269A1 (en) * 2007-07-13 2009-01-15 Pinto Gino A Stray Capacitance Compensation for a Capacitive Sensor
US8898036B2 (en) 2007-08-06 2014-11-25 Rosemount Inc. Process variable transmitter with acceleration sensor
US7484416B1 (en) 2007-10-15 2009-02-03 Rosemount Inc. Process control transmitter with vibration sensor
WO2009154748A2 (en) 2008-06-17 2009-12-23 Rosemount Inc. Rf adapter for field device with low voltage intrinsic safety clamping
JP2009250874A (ja) * 2008-04-09 2009-10-29 Nagano Keiki Co Ltd 物理量センサおよびその製造方法
CN102084626B (zh) 2008-06-17 2013-09-18 罗斯蒙德公司 用于具有环路电流旁路的现场设备的rf适配器
CN102067048B (zh) 2008-06-17 2017-03-08 罗斯蒙特公司 用于具有可变压降的现场设备的rf适配器
US8929948B2 (en) 2008-06-17 2015-01-06 Rosemount Inc. Wireless communication adapter for field devices
US8694060B2 (en) 2008-06-17 2014-04-08 Rosemount Inc. Form factor and electromagnetic interference protection for process device wireless adapters
US7870791B2 (en) * 2008-12-03 2011-01-18 Rosemount Inc. Method and apparatus for pressure measurement using quartz crystal
US7954383B2 (en) * 2008-12-03 2011-06-07 Rosemount Inc. Method and apparatus for pressure measurement using fill tube
US8327713B2 (en) 2008-12-03 2012-12-11 Rosemount Inc. Method and apparatus for pressure measurement using magnetic property
US9674976B2 (en) 2009-06-16 2017-06-06 Rosemount Inc. Wireless process communication adapter with improved encapsulation
US8626087B2 (en) 2009-06-16 2014-01-07 Rosemount Inc. Wire harness for field devices used in a hazardous locations
US8429978B2 (en) 2010-03-30 2013-04-30 Rosemount Inc. Resonant frequency based pressure sensor
US8234927B2 (en) 2010-06-08 2012-08-07 Rosemount Inc. Differential pressure sensor with line pressure measurement
US8132464B2 (en) 2010-07-12 2012-03-13 Rosemount Inc. Differential pressure transmitter with complimentary dual absolute pressure sensors
US10761524B2 (en) 2010-08-12 2020-09-01 Rosemount Inc. Wireless adapter with process diagnostics
US9310794B2 (en) 2011-10-27 2016-04-12 Rosemount Inc. Power supply for industrial process field device
US8752433B2 (en) 2012-06-19 2014-06-17 Rosemount Inc. Differential pressure transmitter with pressure sensor
US9194760B2 (en) 2013-03-14 2015-11-24 Dwyer Instruments, Inc. Capacitive pressure sensor with reduced parasitic capacitance
US9048901B2 (en) 2013-03-15 2015-06-02 Rosemount Inc. Wireless interface within transmitter
CN116380326B (zh) * 2023-04-13 2024-11-05 北京华丞电子有限公司 压力传感器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2714703A (en) * 1954-10-26 1955-08-02 Avieu Knickerbocker Inc Transducer
DE1259600B (de) * 1960-07-01 1968-01-25 Onera (Off Nat Aerospatiale) Vorrichtung zum Messen des Druckes mittels einer den einen Belag eines elektrischen Kondensators bildenden Membran und Verfahren zur teilweisen Herstellung der Vorrichtung
US3249833A (en) * 1964-11-16 1966-05-03 Robert E Vosteen Capacitor transducer
US4084438A (en) * 1976-03-29 1978-04-18 Setra Systems, Inc. Capacitive pressure sensing device
US4120206A (en) * 1977-01-17 1978-10-17 Rosemount Inc. Differential pressure sensor capsule with low acceleration sensitivity
FR2386644A1 (fr) * 1977-04-08 1978-11-03 Doris Dev Richesse Sous Marine Ouvrage oscillant pour exploitation en mer
JPS542783A (en) * 1977-06-09 1979-01-10 Fuji Electric Co Ltd Production of pressure or differential pressure measuring apparatus
JPS5831855B2 (ja) * 1977-06-22 1983-07-08 富士電機株式会社 圧力測定装置の製造方法
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
JPS5565127A (en) * 1978-11-07 1980-05-16 Vaisala Oy Pressure gauge based on aneroid box
US4229776A (en) * 1978-11-21 1980-10-21 Vaisala Oy Capacitive capsule for aneroid pressure gauge
FR2442437A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre fonde sur l'usage d'une capsule aneroide

Also Published As

Publication number Publication date
FR2492978B1 (OSRAM) 1984-10-26
JPS57149933A (en) 1982-09-16
GB2086058A (en) 1982-05-06
GB2086058B (en) 1984-08-15
DE3142387C2 (OSRAM) 1987-12-17
DE3142387A1 (de) 1982-07-08
US4358814A (en) 1982-11-09
FR2492978A1 (fr) 1982-04-30

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