JPH025241B2 - - Google Patents

Info

Publication number
JPH025241B2
JPH025241B2 JP21334483A JP21334483A JPH025241B2 JP H025241 B2 JPH025241 B2 JP H025241B2 JP 21334483 A JP21334483 A JP 21334483A JP 21334483 A JP21334483 A JP 21334483A JP H025241 B2 JPH025241 B2 JP H025241B2
Authority
JP
Japan
Prior art keywords
light beam
movable
reflector
incident
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21334483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60105903A (ja
Inventor
Yoshuki Kakinuma
Masanobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP21334483A priority Critical patent/JPS60105903A/ja
Publication of JPS60105903A publication Critical patent/JPS60105903A/ja
Publication of JPH025241B2 publication Critical patent/JPH025241B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP21334483A 1983-11-15 1983-11-15 平行光束走査装置 Granted JPS60105903A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21334483A JPS60105903A (ja) 1983-11-15 1983-11-15 平行光束走査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21334483A JPS60105903A (ja) 1983-11-15 1983-11-15 平行光束走査装置

Publications (2)

Publication Number Publication Date
JPS60105903A JPS60105903A (ja) 1985-06-11
JPH025241B2 true JPH025241B2 (enrdf_load_stackoverflow) 1990-02-01

Family

ID=16637598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21334483A Granted JPS60105903A (ja) 1983-11-15 1983-11-15 平行光束走査装置

Country Status (1)

Country Link
JP (1) JPS60105903A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS60105903A (ja) 1985-06-11

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