JPH02503703A - ターボ分子真空ポンプ - Google Patents

ターボ分子真空ポンプ

Info

Publication number
JPH02503703A
JPH02503703A JP63507664A JP50766488A JPH02503703A JP H02503703 A JPH02503703 A JP H02503703A JP 63507664 A JP63507664 A JP 63507664A JP 50766488 A JP50766488 A JP 50766488A JP H02503703 A JPH02503703 A JP H02503703A
Authority
JP
Japan
Prior art keywords
gas
passage
dynamic seal
rotor
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63507664A
Other languages
English (en)
Japanese (ja)
Inventor
セルゲエフ　ヴラディミル　パヴロヴィチ
ショロホフ　ヴァレリイ　ボリソヴィチ
ヴィフレフ　ヴラディミル　イリイチ
シャルシィン　セルゲイ　ニコラエヴィチ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPH02503703A publication Critical patent/JPH02503703A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/10—Shaft sealings
    • F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/40—Sealings between relatively-moving surfaces by means of fluid
    • F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
JP63507664A 1988-03-30 1988-03-30 ターボ分子真空ポンプ Pending JPH02503703A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000076 WO1989009341A1 (fr) 1988-03-30 1988-03-30 Pompe a vide turbomoleculaire

Publications (1)

Publication Number Publication Date
JPH02503703A true JPH02503703A (ja) 1990-11-01

Family

ID=21617228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63507664A Pending JPH02503703A (ja) 1988-03-30 1988-03-30 ターボ分子真空ポンプ

Country Status (7)

Country Link
JP (1) JPH02503703A (enExample)
CH (1) CH676378A5 (enExample)
DE (1) DE3891280T1 (enExample)
FI (1) FI895719A7 (enExample)
FR (1) FR2632361B1 (enExample)
GB (1) GB2230562B (enExample)
WO (1) WO1989009341A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2928615B2 (ja) * 1990-09-28 1999-08-03 株式会社日立製作所 ターボ真空ポンプ
DE19915983A1 (de) 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1978239A (en) * 1930-04-21 1934-10-23 Elizabeth Wheeler Multistage impact packing
US2390332A (en) * 1943-10-14 1945-12-04 Westinghouse Electric Corp Blower apparatus
US3131940A (en) * 1957-02-12 1964-05-05 Alsacienne Constr Meca Fluid-tightness device for the passage of a rotating shaft through a wall
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2224009A5 (enExample) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (enExample) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
FI895719A0 (fi) 1989-11-29
GB2230562B (en) 1991-09-11
FI895719A7 (fi) 1989-11-29
DE3891280T1 (de) 1990-04-05
GB2230562A (en) 1990-10-24
FR2632361B1 (fr) 1992-05-07
WO1989009341A1 (fr) 1989-10-05
FR2632361A1 (fr) 1989-12-08
GB8926400D0 (en) 1990-08-01
CH676378A5 (enExample) 1991-01-15

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