JPH0249722Y2 - - Google Patents

Info

Publication number
JPH0249722Y2
JPH0249722Y2 JP5338886U JP5338886U JPH0249722Y2 JP H0249722 Y2 JPH0249722 Y2 JP H0249722Y2 JP 5338886 U JP5338886 U JP 5338886U JP 5338886 U JP5338886 U JP 5338886U JP H0249722 Y2 JPH0249722 Y2 JP H0249722Y2
Authority
JP
Japan
Prior art keywords
smif
vehicle
semiconductor
semiconductor manufacturing
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5338886U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62163951U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5338886U priority Critical patent/JPH0249722Y2/ja
Priority to US07/018,993 priority patent/US4826360A/en
Priority to EP87301888A priority patent/EP0239266A3/en
Priority to CA000531391A priority patent/CA1271271A/en
Priority to KR870002102A priority patent/KR870009446A/ko
Publication of JPS62163951U publication Critical patent/JPS62163951U/ja
Application granted granted Critical
Publication of JPH0249722Y2 publication Critical patent/JPH0249722Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP5338886U 1986-03-10 1986-04-09 Expired JPH0249722Y2 (pm)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5338886U JPH0249722Y2 (pm) 1986-04-09 1986-04-09
US07/018,993 US4826360A (en) 1986-03-10 1987-02-25 Transfer system in a clean room
EP87301888A EP0239266A3 (en) 1986-03-10 1987-03-04 Transfer system in a clean room
CA000531391A CA1271271A (en) 1986-03-10 1987-03-06 Semiconductor wafer transport system in a clean room
KR870002102A KR870009446A (ko) 1986-03-10 1987-03-09 크린룸 내의 이송 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5338886U JPH0249722Y2 (pm) 1986-04-09 1986-04-09

Publications (2)

Publication Number Publication Date
JPS62163951U JPS62163951U (pm) 1987-10-17
JPH0249722Y2 true JPH0249722Y2 (pm) 1990-12-27

Family

ID=30879406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5338886U Expired JPH0249722Y2 (pm) 1986-03-10 1986-04-09

Country Status (1)

Country Link
JP (1) JPH0249722Y2 (pm)

Also Published As

Publication number Publication date
JPS62163951U (pm) 1987-10-17

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