JPH0249721Y2 - - Google Patents
Info
- Publication number
- JPH0249721Y2 JPH0249721Y2 JP5442785U JP5442785U JPH0249721Y2 JP H0249721 Y2 JPH0249721 Y2 JP H0249721Y2 JP 5442785 U JP5442785 U JP 5442785U JP 5442785 U JP5442785 U JP 5442785U JP H0249721 Y2 JPH0249721 Y2 JP H0249721Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- storage container
- wafer storage
- filtration filter
- container body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 42
- 238000001914 filtration Methods 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 10
- 230000006355 external stress Effects 0.000 claims description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 230000014759 maintenance of location Effects 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 3
- 229920006254 polymer film Polymers 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 3
- 229920003002 synthetic resin Polymers 0.000 claims description 3
- 239000000057 synthetic resin Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 43
- 239000003570 air Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5442785U JPH0249721Y2 (en:Method) | 1985-04-12 | 1985-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5442785U JPH0249721Y2 (en:Method) | 1985-04-12 | 1985-04-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61172086U JPS61172086U (en:Method) | 1986-10-25 |
| JPH0249721Y2 true JPH0249721Y2 (en:Method) | 1990-12-27 |
Family
ID=30576176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5442785U Expired JPH0249721Y2 (en:Method) | 1985-04-12 | 1985-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249721Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032802A (en) * | 1995-11-16 | 2000-03-07 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with filter means |
-
1985
- 1985-04-12 JP JP5442785U patent/JPH0249721Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6032802A (en) * | 1995-11-16 | 2000-03-07 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with filter means |
| US6105781A (en) * | 1995-11-16 | 2000-08-22 | Sumitomo Metal Industries, Ltd. | Thin-plate supporting container with unitary porous gasket |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61172086U (en:Method) | 1986-10-25 |
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