JPH019172Y2 - - Google Patents
Info
- Publication number
- JPH019172Y2 JPH019172Y2 JP8072385U JP8072385U JPH019172Y2 JP H019172 Y2 JPH019172 Y2 JP H019172Y2 JP 8072385 U JP8072385 U JP 8072385U JP 8072385 U JP8072385 U JP 8072385U JP H019172 Y2 JPH019172 Y2 JP H019172Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- filtration filter
- storage container
- molecular filtration
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 34
- 238000001914 filtration Methods 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 6
- 230000003014 reinforcing effect Effects 0.000 claims description 6
- 239000000835 fiber Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 230000006355 external stress Effects 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 230000002940 repellent Effects 0.000 claims 1
- 239000005871 repellent Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 31
- 239000000428 dust Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000029058 respiratory gaseous exchange Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8072385U JPH019172Y2 (en:Method) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8072385U JPH019172Y2 (en:Method) | 1985-05-29 | 1985-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61196536U JPS61196536U (en:Method) | 1986-12-08 |
| JPH019172Y2 true JPH019172Y2 (en:Method) | 1989-03-13 |
Family
ID=30626846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8072385U Expired JPH019172Y2 (en:Method) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019172Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5873468A (en) * | 1995-11-16 | 1999-02-23 | Sumitomo Sitix Corporation | Thin-plate supporting container with filter means |
-
1985
- 1985-05-29 JP JP8072385U patent/JPH019172Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61196536U (en:Method) | 1986-12-08 |
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