JPH0249719Y2 - - Google Patents

Info

Publication number
JPH0249719Y2
JPH0249719Y2 JP1985197457U JP19745785U JPH0249719Y2 JP H0249719 Y2 JPH0249719 Y2 JP H0249719Y2 JP 1985197457 U JP1985197457 U JP 1985197457U JP 19745785 U JP19745785 U JP 19745785U JP H0249719 Y2 JPH0249719 Y2 JP H0249719Y2
Authority
JP
Japan
Prior art keywords
wafer
platen
ion implantation
clamp
clamp member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985197457U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62107447U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985197457U priority Critical patent/JPH0249719Y2/ja
Publication of JPS62107447U publication Critical patent/JPS62107447U/ja
Application granted granted Critical
Publication of JPH0249719Y2 publication Critical patent/JPH0249719Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1985197457U 1985-12-24 1985-12-24 Expired JPH0249719Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985197457U JPH0249719Y2 (enrdf_load_html_response) 1985-12-24 1985-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985197457U JPH0249719Y2 (enrdf_load_html_response) 1985-12-24 1985-12-24

Publications (2)

Publication Number Publication Date
JPS62107447U JPS62107447U (enrdf_load_html_response) 1987-07-09
JPH0249719Y2 true JPH0249719Y2 (enrdf_load_html_response) 1990-12-27

Family

ID=31157212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985197457U Expired JPH0249719Y2 (enrdf_load_html_response) 1985-12-24 1985-12-24

Country Status (1)

Country Link
JP (1) JPH0249719Y2 (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2851766B2 (ja) * 1993-04-28 1999-01-27 京セラ株式会社 静電チャック
JP5545287B2 (ja) * 2011-10-17 2014-07-09 日新イオン機器株式会社 エネルギー線照射装置及びワーク搬送機構

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848434A (ja) * 1981-09-17 1983-03-22 Toshiba Corp 静電チヤツク装置
JPS5968931A (ja) * 1982-10-12 1984-04-19 Mitsubishi Electric Corp 半導体ウエ−ハ取扱用具

Also Published As

Publication number Publication date
JPS62107447U (enrdf_load_html_response) 1987-07-09

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