JPH0249699Y2 - - Google Patents

Info

Publication number

JPH0249699Y2

JPH0249699Y2 JP13838385U JP13838385U JPH0249699Y2 JP H0249699 Y2 JPH0249699 Y2 JP H0249699Y2 JP 13838385 U JP13838385 U JP 13838385U JP 13838385 U JP13838385 U JP 13838385U JP H0249699 Y2 JPH0249699 Y2 JP H0249699Y2

Authority

JP

Japan

Prior art keywords

capacitor

piezoelectric element

capacitance

plate

variable

Prior art date

1985-09-09

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000003990 capacitor Substances 0.000 claims description 31
• 239000000463 material Substances 0.000 claims description 5
• 238000006073 displacement reaction Methods 0.000 description 3
• 238000010586 diagram Methods 0.000 description 2
• 230000000694 effects Effects 0.000 description 2
• 230000005684 electric field Effects 0.000 description 2
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 230000008878 coupling Effects 0.000 description 1
• 238000010168 coupling process Methods 0.000 description 1
• 238000005859 coupling reaction Methods 0.000 description 1
• 239000013078 crystal Substances 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• 150000003839 salts Chemical class 0.000 description 1
• 230000035945 sensitivity Effects 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1
• 239000010936 titanium Substances 0.000 description 1