JPH0248043B2 - - Google Patents

Info

Publication number
JPH0248043B2
JPH0248043B2 JP57211085A JP21108582A JPH0248043B2 JP H0248043 B2 JPH0248043 B2 JP H0248043B2 JP 57211085 A JP57211085 A JP 57211085A JP 21108582 A JP21108582 A JP 21108582A JP H0248043 B2 JPH0248043 B2 JP H0248043B2
Authority
JP
Japan
Prior art keywords
wafer
chuck
orientation flat
vacuum suction
suction plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57211085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59100806A (ja
Inventor
Hisashi Nakamoto
Masane Suzuki
Shigeru Inaba
Masaaki Chikaike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Priority to JP57211085A priority Critical patent/JPS59100806A/ja
Publication of JPS59100806A publication Critical patent/JPS59100806A/ja
Publication of JPH0248043B2 publication Critical patent/JPH0248043B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7049—Technique, e.g. interferometric
    • G03F9/7053—Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves
    • G03F9/7057—Gas flow, e.g. for focusing, leveling or gap setting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Feeding Of Articles To Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Specific Conveyance Elements (AREA)
JP57211085A 1982-12-01 1982-12-01 Ｌｓｉ用ウエ−ハの平面度検査装置におけるウエ−ハ角度位置合せ・移送装置 Granted JPS59100806A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57211085A JPS59100806A (ja) 1982-12-01 1982-12-01 Ｌｓｉ用ウエ−ハの平面度検査装置におけるウエ−ハ角度位置合せ・移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57211085A JPS59100806A (ja) 1982-12-01 1982-12-01 Ｌｓｉ用ウエ−ハの平面度検査装置におけるウエ−ハ角度位置合せ・移送装置

Publications (2)

Publication Number Publication Date
JPS59100806A JPS59100806A (ja) 1984-06-11
JPH0248043B2 true JPH0248043B2 (enExample) 1990-10-23

Family

ID=16600164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57211085A Granted JPS59100806A (ja) 1982-12-01 1982-12-01 Ｌｓｉ用ウエ−ハの平面度検査装置におけるウエ−ハ角度位置合せ・移送装置

Country Status (1)

Country Link
JP (1) JPS59100806A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61254304A (ja) * 1985-05-02 1986-11-12 日東電工株式会社 ウエハの位置合せ方法
JPH0613962B2 (ja) * 1985-08-14 1994-02-23 日立電子株式会社 Ｉｃウエハの自動位置決め装置
JP4824647B2 (ja) * 2007-08-06 2011-11-30 株式会社神戸製鋼所 平坦度測定方法
KR101129056B1 (ko) 2010-03-22 2012-03-27 대원강업주식회사 소형 압축 스프링의 코일 내경 검사장치
CN108225237B (zh) * 2017-12-29 2020-04-10 南阳英良石业有限公司 一种负压式人造石制备用检测装置

Also Published As

Publication number Publication date
JPS59100806A (ja) 1984-06-11

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