JPH0247858B2 - - Google Patents

Info

Publication number
JPH0247858B2
JPH0247858B2 JP58110584A JP11058483A JPH0247858B2 JP H0247858 B2 JPH0247858 B2 JP H0247858B2 JP 58110584 A JP58110584 A JP 58110584A JP 11058483 A JP11058483 A JP 11058483A JP H0247858 B2 JPH0247858 B2 JP H0247858B2
Authority
JP
Japan
Prior art keywords
probe card
locking piece
prober
head
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58110584A
Other languages
English (en)
Japanese (ja)
Other versions
JPS601840A (ja
Inventor
Toshimi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP58110584A priority Critical patent/JPS601840A/ja
Publication of JPS601840A publication Critical patent/JPS601840A/ja
Publication of JPH0247858B2 publication Critical patent/JPH0247858B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58110584A 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置 Granted JPS601840A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58110584A JPS601840A (ja) 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58110584A JPS601840A (ja) 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置

Publications (2)

Publication Number Publication Date
JPS601840A JPS601840A (ja) 1985-01-08
JPH0247858B2 true JPH0247858B2 (cs) 1990-10-23

Family

ID=14539548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58110584A Granted JPS601840A (ja) 1983-06-20 1983-06-20 プロ−ブカ−ドの固定装置

Country Status (1)

Country Link
JP (1) JPS601840A (cs)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125902A (ja) * 1984-11-21 1986-06-13 Yokohama Rubber Co Ltd:The 空気入りタイヤ
US4721198A (en) * 1985-11-13 1988-01-26 Ando Electric Co., Ltd. Probe card clamping and changing mechanism
JPH0338833Y2 (cs) * 1985-12-04 1991-08-15
JPH0618228B2 (ja) * 1987-07-20 1994-03-09 東京エレクトロン株式会社 プロ−ブ装置
US6946859B2 (en) 2003-03-12 2005-09-20 Celerity Research, Inc. Probe structures using clamped substrates with compliant interconnectors
US7170306B2 (en) 2003-03-12 2007-01-30 Celerity Research, Inc. Connecting a probe card and an interposer using a compliant connector
US6924654B2 (en) 2003-03-12 2005-08-02 Celerity Research, Inc. Structures for testing circuits and methods for fabricating the structures

Also Published As

Publication number Publication date
JPS601840A (ja) 1985-01-08

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