JPH0247515Y2 - - Google Patents

Info

Publication number
JPH0247515Y2
JPH0247515Y2 JP12997185U JP12997185U JPH0247515Y2 JP H0247515 Y2 JPH0247515 Y2 JP H0247515Y2 JP 12997185 U JP12997185 U JP 12997185U JP 12997185 U JP12997185 U JP 12997185U JP H0247515 Y2 JPH0247515 Y2 JP H0247515Y2
Authority
JP
Japan
Prior art keywords
shaft
fixed
gear
board
shaft rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12997185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6240585U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12997185U priority Critical patent/JPH0247515Y2/ja
Publication of JPS6240585U publication Critical patent/JPS6240585U/ja
Application granted granted Critical
Publication of JPH0247515Y2 publication Critical patent/JPH0247515Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gears, Cams (AREA)
JP12997185U 1985-08-28 1985-08-28 Expired JPH0247515Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12997185U JPH0247515Y2 (fr) 1985-08-28 1985-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12997185U JPH0247515Y2 (fr) 1985-08-28 1985-08-28

Publications (2)

Publication Number Publication Date
JPS6240585U JPS6240585U (fr) 1987-03-11
JPH0247515Y2 true JPH0247515Y2 (fr) 1990-12-13

Family

ID=31027029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12997185U Expired JPH0247515Y2 (fr) 1985-08-28 1985-08-28

Country Status (1)

Country Link
JP (1) JPH0247515Y2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8941810B2 (en) 2005-12-30 2015-01-27 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9152058B2 (en) 2003-06-09 2015-10-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method involving a member and a fluid opening

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9152058B2 (en) 2003-06-09 2015-10-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method involving a member and a fluid opening
US9541843B2 (en) 2003-06-09 2017-01-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
US8941810B2 (en) 2005-12-30 2015-01-27 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US8947631B2 (en) 2005-12-30 2015-02-03 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US9436096B2 (en) 2005-12-30 2016-09-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPS6240585U (fr) 1987-03-11

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