JPH0247515Y2 - - Google Patents
Info
- Publication number
- JPH0247515Y2 JPH0247515Y2 JP12997185U JP12997185U JPH0247515Y2 JP H0247515 Y2 JPH0247515 Y2 JP H0247515Y2 JP 12997185 U JP12997185 U JP 12997185U JP 12997185 U JP12997185 U JP 12997185U JP H0247515 Y2 JPH0247515 Y2 JP H0247515Y2
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- fixed
- gear
- board
- shaft rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920003002 synthetic resin Polymers 0.000 description 8
- 239000000057 synthetic resin Substances 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
Landscapes
- Gears, Cams (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12997185U JPH0247515Y2 (enrdf_load_html_response) | 1985-08-28 | 1985-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12997185U JPH0247515Y2 (enrdf_load_html_response) | 1985-08-28 | 1985-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6240585U JPS6240585U (enrdf_load_html_response) | 1987-03-11 |
| JPH0247515Y2 true JPH0247515Y2 (enrdf_load_html_response) | 1990-12-13 |
Family
ID=31027029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12997185U Expired JPH0247515Y2 (enrdf_load_html_response) | 1985-08-28 | 1985-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247515Y2 (enrdf_load_html_response) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8941810B2 (en) | 2005-12-30 | 2015-01-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9081299B2 (en) | 2003-06-09 | 2015-07-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
-
1985
- 1985-08-28 JP JP12997185U patent/JPH0247515Y2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9081299B2 (en) | 2003-06-09 | 2015-07-14 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap |
| US9152058B2 (en) | 2003-06-09 | 2015-10-06 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method involving a member and a fluid opening |
| US9541843B2 (en) | 2003-06-09 | 2017-01-10 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid |
| US8941810B2 (en) | 2005-12-30 | 2015-01-27 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US8947631B2 (en) | 2005-12-30 | 2015-02-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US9436096B2 (en) | 2005-12-30 | 2016-09-06 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6240585U (enrdf_load_html_response) | 1987-03-11 |