JPH0247032U - - Google Patents

Info

Publication number
JPH0247032U
JPH0247032U JP12660788U JP12660788U JPH0247032U JP H0247032 U JPH0247032 U JP H0247032U JP 12660788 U JP12660788 U JP 12660788U JP 12660788 U JP12660788 U JP 12660788U JP H0247032 U JPH0247032 U JP H0247032U
Authority
JP
Japan
Prior art keywords
substrate
ultrasonic
irradiate
processing liquid
surface treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12660788U
Other languages
English (en)
Japanese (ja)
Other versions
JP2538492Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12660788U priority Critical patent/JP2538492Y2/ja
Publication of JPH0247032U publication Critical patent/JPH0247032U/ja
Application granted granted Critical
Publication of JP2538492Y2 publication Critical patent/JP2538492Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP12660788U 1988-09-27 1988-09-27 基板の表面処理装置 Expired - Lifetime JP2538492Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12660788U JP2538492Y2 (ja) 1988-09-27 1988-09-27 基板の表面処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12660788U JP2538492Y2 (ja) 1988-09-27 1988-09-27 基板の表面処理装置

Publications (2)

Publication Number Publication Date
JPH0247032U true JPH0247032U (enrdf_load_stackoverflow) 1990-03-30
JP2538492Y2 JP2538492Y2 (ja) 1997-06-18

Family

ID=31378281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12660788U Expired - Lifetime JP2538492Y2 (ja) 1988-09-27 1988-09-27 基板の表面処理装置

Country Status (1)

Country Link
JP (1) JP2538492Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JP2538492Y2 (ja) 1997-06-18

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