JPH0244513Y2 - - Google Patents
Info
- Publication number
- JPH0244513Y2 JPH0244513Y2 JP17973086U JP17973086U JPH0244513Y2 JP H0244513 Y2 JPH0244513 Y2 JP H0244513Y2 JP 17973086 U JP17973086 U JP 17973086U JP 17973086 U JP17973086 U JP 17973086U JP H0244513 Y2 JPH0244513 Y2 JP H0244513Y2
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- resist
- metal plate
- light
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 description 16
- 235000012431 wafers Nutrition 0.000 description 16
- 238000000034 method Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 7
- 238000006552 photochemical reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17973086U JPH0244513Y2 (en, 2012) | 1986-11-25 | 1986-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17973086U JPH0244513Y2 (en, 2012) | 1986-11-25 | 1986-11-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6384935U JPS6384935U (en, 2012) | 1988-06-03 |
| JPH0244513Y2 true JPH0244513Y2 (en, 2012) | 1990-11-27 |
Family
ID=31123048
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17973086U Expired JPH0244513Y2 (en, 2012) | 1986-11-25 | 1986-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244513Y2 (en, 2012) |
-
1986
- 1986-11-25 JP JP17973086U patent/JPH0244513Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6384935U (en, 2012) | 1988-06-03 |
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