JPH0244193Y2 - - Google Patents
Info
- Publication number
- JPH0244193Y2 JPH0244193Y2 JP8572485U JP8572485U JPH0244193Y2 JP H0244193 Y2 JPH0244193 Y2 JP H0244193Y2 JP 8572485 U JP8572485 U JP 8572485U JP 8572485 U JP8572485 U JP 8572485U JP H0244193 Y2 JPH0244193 Y2 JP H0244193Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample stage
- electron microscope
- vacuum
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 238000000576 coating method Methods 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 6
- 150000001768 cations Chemical class 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000001771 vacuum deposition Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 105
- 238000000034 method Methods 0.000 description 19
- 239000011247 coating layer Substances 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 230000002159 abnormal effect Effects 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000001493 electron microscopy Methods 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910018879 Pt—Pd Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000000813 microbial effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001721 carbon Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8572485U JPH0244193Y2 (en, 2012) | 1985-06-06 | 1985-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8572485U JPH0244193Y2 (en, 2012) | 1985-06-06 | 1985-06-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61202048U JPS61202048U (en, 2012) | 1986-12-18 |
| JPH0244193Y2 true JPH0244193Y2 (en, 2012) | 1990-11-22 |
Family
ID=30636377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8572485U Expired JPH0244193Y2 (en, 2012) | 1985-06-06 | 1985-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0244193Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012202834A (ja) * | 2011-03-25 | 2012-10-22 | Tokyo Electric Power Co Inc:The | 高分子材料の微細構造の観察方法 |
-
1985
- 1985-06-06 JP JP8572485U patent/JPH0244193Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61202048U (en, 2012) | 1986-12-18 |
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