JPH0241166Y2 - - Google Patents
Info
- Publication number
- JPH0241166Y2 JPH0241166Y2 JP12547984U JP12547984U JPH0241166Y2 JP H0241166 Y2 JPH0241166 Y2 JP H0241166Y2 JP 12547984 U JP12547984 U JP 12547984U JP 12547984 U JP12547984 U JP 12547984U JP H0241166 Y2 JPH0241166 Y2 JP H0241166Y2
- Authority
- JP
- Japan
- Prior art keywords
- inner cylinder
- bottom wall
- outer cylinder
- support plate
- cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000498 cooling water Substances 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 230000000452 restraining effect Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12547984U JPS6143261U (ja) | 1984-08-17 | 1984-08-17 | 真空蒸着装置の蒸着源移動装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12547984U JPS6143261U (ja) | 1984-08-17 | 1984-08-17 | 真空蒸着装置の蒸着源移動装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6143261U JPS6143261U (ja) | 1986-03-20 |
| JPH0241166Y2 true JPH0241166Y2 (enrdf_load_stackoverflow) | 1990-11-01 |
Family
ID=30684170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12547984U Granted JPS6143261U (ja) | 1984-08-17 | 1984-08-17 | 真空蒸着装置の蒸着源移動装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6143261U (enrdf_load_stackoverflow) |
-
1984
- 1984-08-17 JP JP12547984U patent/JPS6143261U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6143261U (ja) | 1986-03-20 |
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