JPH0240879B2 - - Google Patents

Info

Publication number
JPH0240879B2
JPH0240879B2 JP56159056A JP15905681A JPH0240879B2 JP H0240879 B2 JPH0240879 B2 JP H0240879B2 JP 56159056 A JP56159056 A JP 56159056A JP 15905681 A JP15905681 A JP 15905681A JP H0240879 B2 JPH0240879 B2 JP H0240879B2
Authority
JP
Japan
Prior art keywords
blades
rotor blade
rotary shaft
fixed
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56159056A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5859395A (ja
Inventor
Tomoaki Urano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP15905681A priority Critical patent/JPS5859395A/ja
Publication of JPS5859395A publication Critical patent/JPS5859395A/ja
Publication of JPH0240879B2 publication Critical patent/JPH0240879B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/024—Multi-stage pumps with contrarotating parts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP15905681A 1981-10-06 1981-10-06 タ−ボ分子ポンプ Granted JPS5859395A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15905681A JPS5859395A (ja) 1981-10-06 1981-10-06 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15905681A JPS5859395A (ja) 1981-10-06 1981-10-06 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS5859395A JPS5859395A (ja) 1983-04-08
JPH0240879B2 true JPH0240879B2 (US06312121-20011106-C00033.png) 1990-09-13

Family

ID=15685253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15905681A Granted JPS5859395A (ja) 1981-10-06 1981-10-06 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS5859395A (US06312121-20011106-C00033.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10149366A1 (de) * 2001-10-06 2003-04-17 Leybold Vakuum Gmbh Axial fördernde Reibungsvakuumpumpe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3044685A (en) * 1959-02-13 1962-07-17 Nicholas P Lapiken Air compressor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3044685A (en) * 1959-02-13 1962-07-17 Nicholas P Lapiken Air compressor

Also Published As

Publication number Publication date
JPS5859395A (ja) 1983-04-08

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