JPH0240312Y2 - - Google Patents
Info
- Publication number
- JPH0240312Y2 JPH0240312Y2 JP17612487U JP17612487U JPH0240312Y2 JP H0240312 Y2 JPH0240312 Y2 JP H0240312Y2 JP 17612487 U JP17612487 U JP 17612487U JP 17612487 U JP17612487 U JP 17612487U JP H0240312 Y2 JPH0240312 Y2 JP H0240312Y2
- Authority
- JP
- Japan
- Prior art keywords
- state
- vacuum
- vacuum pump
- button
- series
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002360 preparation method Methods 0.000 description 33
- 238000009792 diffusion process Methods 0.000 description 17
- 238000000034 method Methods 0.000 description 11
- 230000007704 transition Effects 0.000 description 11
- 238000003825 pressing Methods 0.000 description 7
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612487U JPH0240312Y2 (enrdf_load_stackoverflow) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17612487U JPH0240312Y2 (enrdf_load_stackoverflow) | 1987-11-18 | 1987-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0180682U JPH0180682U (enrdf_load_stackoverflow) | 1989-05-30 |
| JPH0240312Y2 true JPH0240312Y2 (enrdf_load_stackoverflow) | 1990-10-26 |
Family
ID=31467883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17612487U Expired JPH0240312Y2 (enrdf_load_stackoverflow) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0240312Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012117491A (ja) * | 2010-12-03 | 2012-06-21 | Tokyo Electron Ltd | 排気装置の制御方法及び排気装置の制御装置 |
-
1987
- 1987-11-18 JP JP17612487U patent/JPH0240312Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0180682U (enrdf_load_stackoverflow) | 1989-05-30 |