JPH0238922Y2 - - Google Patents
Info
- Publication number
- JPH0238922Y2 JPH0238922Y2 JP12275783U JP12275783U JPH0238922Y2 JP H0238922 Y2 JPH0238922 Y2 JP H0238922Y2 JP 12275783 U JP12275783 U JP 12275783U JP 12275783 U JP12275783 U JP 12275783U JP H0238922 Y2 JPH0238922 Y2 JP H0238922Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heating device
- storage device
- vacuum chamber
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 13
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275783U JPS6032360U (ja) | 1983-08-06 | 1983-08-06 | 真空蒸着装置に於けるるつぼ交換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12275783U JPS6032360U (ja) | 1983-08-06 | 1983-08-06 | 真空蒸着装置に於けるるつぼ交換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6032360U JPS6032360U (ja) | 1985-03-05 |
| JPH0238922Y2 true JPH0238922Y2 (enrdf_load_stackoverflow) | 1990-10-19 |
Family
ID=30280469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12275783U Granted JPS6032360U (ja) | 1983-08-06 | 1983-08-06 | 真空蒸着装置に於けるるつぼ交換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6032360U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2580094Y2 (ja) * | 1992-04-27 | 1998-09-03 | 石川島播磨重工業株式会社 | 電子ビーム銃 |
| JP2012246534A (ja) * | 2011-05-27 | 2012-12-13 | Nec Corp | 蒸着装置 |
-
1983
- 1983-08-06 JP JP12275783U patent/JPS6032360U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6032360U (ja) | 1985-03-05 |