JPH0238469U - - Google Patents

Info

Publication number
JPH0238469U
JPH0238469U JP11467388U JP11467388U JPH0238469U JP H0238469 U JPH0238469 U JP H0238469U JP 11467388 U JP11467388 U JP 11467388U JP 11467388 U JP11467388 U JP 11467388U JP H0238469 U JPH0238469 U JP H0238469U
Authority
JP
Japan
Prior art keywords
electrode plate
magnets
glow discharge
gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11467388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11467388U priority Critical patent/JPH0238469U/ja
Publication of JPH0238469U publication Critical patent/JPH0238469U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11467388U 1988-08-31 1988-08-31 Pending JPH0238469U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11467388U JPH0238469U (enrdf_load_stackoverflow) 1988-08-31 1988-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11467388U JPH0238469U (enrdf_load_stackoverflow) 1988-08-31 1988-08-31

Publications (1)

Publication Number Publication Date
JPH0238469U true JPH0238469U (enrdf_load_stackoverflow) 1990-03-14

Family

ID=31355638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11467388U Pending JPH0238469U (enrdf_load_stackoverflow) 1988-08-31 1988-08-31

Country Status (1)

Country Link
JP (1) JPH0238469U (enrdf_load_stackoverflow)

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