JPH0374661U - - Google Patents

Info

Publication number
JPH0374661U
JPH0374661U JP13415589U JP13415589U JPH0374661U JP H0374661 U JPH0374661 U JP H0374661U JP 13415589 U JP13415589 U JP 13415589U JP 13415589 U JP13415589 U JP 13415589U JP H0374661 U JPH0374661 U JP H0374661U
Authority
JP
Japan
Prior art keywords
magnet
plasma
annular
annular electrodes
cylindrical base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13415589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13415589U priority Critical patent/JPH0374661U/ja
Publication of JPH0374661U publication Critical patent/JPH0374661U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP13415589U 1989-11-17 1989-11-17 Pending JPH0374661U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13415589U JPH0374661U (enrdf_load_stackoverflow) 1989-11-17 1989-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13415589U JPH0374661U (enrdf_load_stackoverflow) 1989-11-17 1989-11-17

Publications (1)

Publication Number Publication Date
JPH0374661U true JPH0374661U (enrdf_load_stackoverflow) 1991-07-26

Family

ID=31681514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13415589U Pending JPH0374661U (enrdf_load_stackoverflow) 1989-11-17 1989-11-17

Country Status (1)

Country Link
JP (1) JPH0374661U (enrdf_load_stackoverflow)

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