JPS63175158U - - Google Patents

Info

Publication number
JPS63175158U
JPS63175158U JP4883987U JP4883987U JPS63175158U JP S63175158 U JPS63175158 U JP S63175158U JP 4883987 U JP4883987 U JP 4883987U JP 4883987 U JP4883987 U JP 4883987U JP S63175158 U JPS63175158 U JP S63175158U
Authority
JP
Japan
Prior art keywords
gas
gas blowing
plasma discharge
discharge field
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4883987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543094Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4883987U priority Critical patent/JPH0543094Y2/ja
Publication of JPS63175158U publication Critical patent/JPS63175158U/ja
Application granted granted Critical
Publication of JPH0543094Y2 publication Critical patent/JPH0543094Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP4883987U 1987-03-31 1987-03-31 Expired - Lifetime JPH0543094Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4883987U JPH0543094Y2 (enrdf_load_stackoverflow) 1987-03-31 1987-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4883987U JPH0543094Y2 (enrdf_load_stackoverflow) 1987-03-31 1987-03-31

Publications (2)

Publication Number Publication Date
JPS63175158U true JPS63175158U (enrdf_load_stackoverflow) 1988-11-14
JPH0543094Y2 JPH0543094Y2 (enrdf_load_stackoverflow) 1993-10-29

Family

ID=30870746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4883987U Expired - Lifetime JPH0543094Y2 (enrdf_load_stackoverflow) 1987-03-31 1987-03-31

Country Status (1)

Country Link
JP (1) JPH0543094Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005026233A (ja) * 1996-10-02 2005-01-27 Tokyo Electron Ltd プラズマ処理装置
JP2012111984A (ja) * 2010-11-22 2012-06-14 Kojima Press Industry Co Ltd 樹脂基材の表面被膜形成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005026233A (ja) * 1996-10-02 2005-01-27 Tokyo Electron Ltd プラズマ処理装置
JP2012111984A (ja) * 2010-11-22 2012-06-14 Kojima Press Industry Co Ltd 樹脂基材の表面被膜形成装置

Also Published As

Publication number Publication date
JPH0543094Y2 (enrdf_load_stackoverflow) 1993-10-29

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