JPH023648U - - Google Patents
Info
- Publication number
- JPH023648U JPH023648U JP8089788U JP8089788U JPH023648U JP H023648 U JPH023648 U JP H023648U JP 8089788 U JP8089788 U JP 8089788U JP 8089788 U JP8089788 U JP 8089788U JP H023648 U JPH023648 U JP H023648U
- Authority
- JP
- Japan
- Prior art keywords
- sphere
- cut
- angle
- center
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案の一実施例の要部平面図第２図
は同じく側面図、第３図は二種の荷電粒子分析器
の焦点深度比較グラフ、第４図は二種類の荷電粒
子分析器の説明図である。 Ａ１，Ａ２，Ａ３…同心二重球面型分析器、Ｓ
…試料、Ｄ１，Ｄ２，Ｄ３…電子銃、ｅ…励起用
電子ビーム、Ｔ…試料台。
は同じく側面図、第３図は二種の荷電粒子分析器
の焦点深度比較グラフ、第４図は二種類の荷電粒
子分析器の説明図である。 Ａ１，Ａ２，Ａ３…同心二重球面型分析器、Ｓ
…試料、Ｄ１，Ｄ２，Ｄ３…電子銃、ｅ…励起用
電子ビーム、Ｔ…試料台。
Claims (1)
- 同心二重球面電極を光軸子午面内で球面中心に
対して張る角が１２０°〜１５０°になるように
切断し、赤道面内で球面中心に対して張る角が６
０°〜１５０°になるように切断してなる同心二
重球面電極型分析器を複数組、試料面の電子放射
点の周囲に配置し、上記各分析器における電子検
出出力に加算、減算、相互比算出等の演算を施す
手段を設けた電子分光分析装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988080897U JPH0751728Y2 (ja) | 1988-06-18 | 1988-06-18 | 電子分光分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988080897U JPH0751728Y2 (ja) | 1988-06-18 | 1988-06-18 | 電子分光分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH023648U true JPH023648U (ja) | 1990-01-11 |
| JPH0751728Y2 JPH0751728Y2 (ja) | 1995-11-22 |
Family
ID=31305711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988080897U Expired - Lifetime JPH0751728Y2 (ja) | 1988-06-18 | 1988-06-18 | 電子分光分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0751728Y2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01100475U (ja) * | 1987-12-24 | 1989-07-05 | ||
| JPH01100477U (ja) * | 1987-12-24 | 1989-07-05 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264989A (en) * | 1975-11-25 | 1977-05-28 | Jeol Ltd | Electronic spectroscope |
| JPS62112848U (ja) * | 1985-11-15 | 1987-07-18 |
-
1988
- 1988-06-18 JP JP1988080897U patent/JPH0751728Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5264989A (en) * | 1975-11-25 | 1977-05-28 | Jeol Ltd | Electronic spectroscope |
| JPS62112848U (ja) * | 1985-11-15 | 1987-07-18 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01100475U (ja) * | 1987-12-24 | 1989-07-05 | ||
| JPH01100477U (ja) * | 1987-12-24 | 1989-07-05 | ||
| JPH0635513Y2 (ja) * | 1987-12-24 | 1994-09-14 | ティアツク株式会社 | 機器の操作パネル用蓋体開閉機構 |
| JPH0636627Y2 (ja) * | 1987-12-24 | 1994-09-21 | ティアツク株式会社 | 機器の操作パネル用蓋体開閉機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0751728Y2 (ja) | 1995-11-22 |
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