JPH0236240Y2 - - Google Patents

Info

Publication number
JPH0236240Y2
JPH0236240Y2 JP15096284U JP15096284U JPH0236240Y2 JP H0236240 Y2 JPH0236240 Y2 JP H0236240Y2 JP 15096284 U JP15096284 U JP 15096284U JP 15096284 U JP15096284 U JP 15096284U JP H0236240 Y2 JPH0236240 Y2 JP H0236240Y2
Authority
JP
Japan
Prior art keywords
electrode plate
temperature plasma
low
fabric
cooling pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15096284U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6166900U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15096284U priority Critical patent/JPH0236240Y2/ja
Priority to US06/784,804 priority patent/US4691137A/en
Priority to DE19853535700 priority patent/DE3535700A1/de
Publication of JPS6166900U publication Critical patent/JPS6166900U/ja
Application granted granted Critical
Publication of JPH0236240Y2 publication Critical patent/JPH0236240Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP15096284U 1984-10-05 1984-10-05 Expired JPH0236240Y2 (cs)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP15096284U JPH0236240Y2 (cs) 1984-10-05 1984-10-05
US06/784,804 US4691137A (en) 1984-10-05 1985-10-04 Electrode plate for generating plasma
DE19853535700 DE3535700A1 (de) 1984-10-05 1985-10-05 Plattenelektrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15096284U JPH0236240Y2 (cs) 1984-10-05 1984-10-05

Publications (2)

Publication Number Publication Date
JPS6166900U JPS6166900U (cs) 1986-05-08
JPH0236240Y2 true JPH0236240Y2 (cs) 1990-10-02

Family

ID=30709094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15096284U Expired JPH0236240Y2 (cs) 1984-10-05 1984-10-05

Country Status (1)

Country Link
JP (1) JPH0236240Y2 (cs)

Also Published As

Publication number Publication date
JPS6166900U (cs) 1986-05-08

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