JPH023620Y2 - - Google Patents

Info

Publication number
JPH023620Y2
JPH023620Y2 JP1981147782U JP14778281U JPH023620Y2 JP H023620 Y2 JPH023620 Y2 JP H023620Y2 JP 1981147782 U JP1981147782 U JP 1981147782U JP 14778281 U JP14778281 U JP 14778281U JP H023620 Y2 JPH023620 Y2 JP H023620Y2
Authority
JP
Japan
Prior art keywords
substrate
container
epitaxial growth
solution
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981147782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5853136U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981147782U priority Critical patent/JPS5853136U/ja
Publication of JPS5853136U publication Critical patent/JPS5853136U/ja
Application granted granted Critical
Publication of JPH023620Y2 publication Critical patent/JPH023620Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1981147782U 1981-10-06 1981-10-06 液相エピタキシヤル成長装置 Granted JPS5853136U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981147782U JPS5853136U (ja) 1981-10-06 1981-10-06 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981147782U JPS5853136U (ja) 1981-10-06 1981-10-06 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS5853136U JPS5853136U (ja) 1983-04-11
JPH023620Y2 true JPH023620Y2 (enrdf_load_html_response) 1990-01-29

Family

ID=29940628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981147782U Granted JPS5853136U (ja) 1981-10-06 1981-10-06 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS5853136U (enrdf_load_html_response)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4939376A (enrdf_load_html_response) * 1972-08-14 1974-04-12
JPS5639538A (en) * 1979-09-07 1981-04-15 Hitachi Ltd Pattern forming method
JPS5690573A (en) * 1979-12-24 1981-07-22 Toshiba Corp Liquid phase growing process for light emitting diode

Also Published As

Publication number Publication date
JPS5853136U (ja) 1983-04-11

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